Wearable humidity sensor with porous membrane by soft-MEMS techniques

Miyoshi, Yoko; Mitsubayashi, Kohji; Sawada, Takanori; Ogawa, Mitsuhiro; Otsuka, Kimio; Takeuchi, Toshio

doi:10.1109/sensor.2005.1497315

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDU

DOI: 10.1109/sensor.2005.1497315

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Wearable humidity sensor with porous membrane by soft-MEMS techniques

Yoko Miyoshi

Kohji Mitsubayashi²,

Takanori Sawada³

et al.

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Wearable humidity sensor with porous membrane by soft-MEMS techniques

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References 7 publications

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