Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS)

Zha, Xuan F.; Toh, Wei Yan; Du, Hejun

doi:10.1007/0-387-25786-1_3

Cited by 1 publication

(2 citation statements)

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“…As stated above, one of the challenges of MEMS technology is that MEMS devices or systems design must be separated from the complexities of the fabrication sequence and packaging processes with consideration of different materials and processes. In our previous work [32][33][34][35][36][37], a knowledgeintensive methodology for design and simulation of MEMS devices was developed, and a Web-based knowledge intensive support framework was built up to support concurrent collaborative design of MEMS. In this concurrent collaborative design framework, an interface is designed to separate design from fabrication/packaging processes, which allows the designer to use process-independent design tools and methodologies [23,28].…”

Section: Concurrent Mems Design Frameworkmentioning

confidence: 99%

“…The design and manufacturing (fabrication and packaging) of MEMS and microelectronic devices and systems need to improve considerably from their current primitive state [23]. The advanced simulation and modeling tools for MEMS design must provide an advisory service so as to help the designer select manufacturing processes and materials for MEMS devices [9,29,[32][33][34][35][36][37]. It is therefore significant to develop an efficient method and system in a computer-aided concurrent collaborative environment for designers to use at the early stages of MEMS design.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Manufacturing process and material selection in concurrent collaborative design of MEMS devices

Zha

2003

J. Micromech. Microeng.

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In this paper we present knowledge of an intensive approach and system for selecting suitable manufacturing processes and materials for microelectromechanical systems (MEMS) devices in concurrent collaborative design environment. In the paper, fundamental issues on MEMS manufacturing process and material selection such as concurrent design framework, manufacturing process and material hierarchies, and selection strategy are first addressed. Then, a fuzzy decision support scheme for a multi-criteria decision-making problem is proposed for estimating, ranking and selecting possible manufacturing processes, materials and their combinations. A Web-based prototype advisory system for the MEMS manufacturing process and material selection, WebMEMS-MASS, is developed based on the client-knowledge server architecture and framework to help the designer find good processes and materials for MEMS devices. The system, as one of the important parts of an advanced simulation and modeling tool for MEMS design, is a concept level process and material selection tool, which can be used as a standalone application or a Java applet via the Web. The running sessions of the system are inter-linked with webpages of tutorials and reference pages to explain the facets, fabrication processes and material choices, and calculations and reasoning in selection are performed using process capability and material property data from a remote Web-based database and interactive knowledge base that can be maintained and updated via the Internet. The use of the developed system including operation scenario, use support, and integration with an MEMS collaborative design system is presented. Finally, an illustration example is provided.

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