Wet etching of proton-exchanged lithium niobate-a novel processing technique

Laurell, Fredrik; Webjörn, J.; Arvidsson, G.; Holmberg, Jan-Erik

doi:10.1109/50.184899

Cited by 80 publications

(32 citation statements)

References 15 publications

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“…Both effects increase the overlap between the applied electric field and the optical mode in a z-cut arrangement, thus providing a lower switching voltage. LiNbO 3 ridges a few micrometers deep can be obtained by wet etching [15], [16] or ion-milling [17] techniques. Smooth ridge sidewalls as well as good control of etch depth and sidewall direction are key in achieving low-loss waveguides with good mode confinement.…”

Section: B Waveguide Fabricationmentioning

confidence: 99%

A review of lithium niobate modulators for fiber-optic communications systems

Wooten

Kissa

Yi‐Yan

et al. 2000

IEEE J. Select. Topics Quantum Electron.

1,175

542

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Abstract-The current status of lithium-niobate external-modulator technology is reviewed with emphasis on design, fabrication, system requirements, performance, and reliability. The technology meets the performance and reliability requirements of current 2.5-, 10-, and 40-Gb/s digital communication systems, as well as CATV analog systems. The current trend in device topology is toward higher data rates and increased levels of integration. In particular, multiple high-speed modulation functions, such as 10-Gb/s return-to-zero pulse generation plus data modulation, have been achieved in a single device.

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Section: B Waveguide Fabricationmentioning

confidence: 99%

A review of lithium niobate modulators for fiber-optic communications systems

Wooten

Kissa

Yi‐Yan

et al. 2000

IEEE J. Select. Topics Quantum Electron.

1,175

542

View full text Add to dashboard Cite

show abstract

“…This problem can be overcome by inducing localized damage to the crystal lattice prior to wet etching, thereby exploiting the preferentiality exhibited by most acidic solutions to etch with a higher rate the structurally modified areas. A number of approaches to producing areas susceptible to etchants in different crystalline materials have been reported, including exposure to UV pulsed laser irradiation [392], proton exchange [393], and ion beam implantation [394]. Ion beam implantation with light ions such as He …”

Section: Wet Chemical Etchingmentioning

confidence: 99%

Optically pumped planar waveguide lasers, Part I: Fundamentals and fabrication techniques

Grivas

2011

Progress in Quantum Electronics

194

102

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Abstract:The tremendous interest in the field of waveguide lasers in the past two decades is largely attributed to the geometry of the gain medium, which provides the possibility to store optical energy on a very small dimension in the form of an optical mode. This allows for realization of sources with enhanced optical gain, low lasing threshold, and small footprint and opens up exciting possibilities in the area of integrated optics by facilitating their on-chip integration with different functionalities and highly compact photonic circuits. Moreover, this geometrical concept is compatible with high power diode pumping schemes as it provides exceptional thermal management, minimizing the impact of thermal loading on laser performance. The proliferation of techniques for fabrication and processing capable of producing high optical quality waveguides has greatly contributed to the growth of waveguide lasers from a topic of fundamental research to an area that encompasses a variety of practical applications. In this first part of the review on optically pumped waveguide lasers the properties that distinguish these sources from other classes of lasers will be discussed. Furthermore, the current state-of-the art in terms of fabrication tools used for producing waveguide lasers is reviewed from the aspects of the processes and the materials involved. 2 1.IntroductionOver the last two decades the field of solid-state planar waveguide lasers has experienced a steady growth, progressing from a laboratory curiosity to an area that demonstrates a broad spectrum of applications, from multiwavelength laser channel arrays for telecommunications to diode-pumped planar structures with multiwatt output powers for sensing and ranging applications. Waveguide lasers are by no means a new field and the first report on such a source dates back in 1961, when laser operation of a waveguide based on an active glass core rod embedded in a low refractive index cladding was demonstrated [1]. However research efforts in the years that followed this report focused primarily on the development of optically pumped laser sources based on high optical quality bulk dielectric laser media in the form of rods and slabs. The merits of the waveguide geometry and the associated optical confinement have been first highlighted in single mode glass optical fibers. Fibers have proven an enabling technology for realization of highly efficient amplifier and laser sources owing to their unrivalled low loss performance and ability to maintain a small spot size and hence high intensities over lengths that are orders of magnitude longer than would normally be allowed by diffraction, [2,3]. Er-doped fiber amplifiers (EDFAs) in particular have directly contributed to the enormous expansion of the optical communications networks that underpin today's internet infrastructure by allowing for signal regeneration and optical data transmission over long distances. The excellent performance of fiber lasers and amplifiers provided motivation and triggered a major techn...

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“…The side surfaces were then covered with fluoric grease to avoid damage during etching, and the sample was soaked in a 1 : 2 mixture of HF:HNO 3 for 3 h at room temperature for etching. Since the etching rate is drastically accelerated by PE [8], the PE regions were selectively etched to leave a ridge structure. After removing the grease by acetone, the waveguide facets were formed by cutting the sample using a dicing saw.…”

mentioning

confidence: 99%

Fabrication of ridge waveguides in LiNbO ₃ thin film crystal by proton-exchange accelerated etching

2009

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A simple fabrication method of adhered LiNbO 3 ridge waveguides by accelerated etching of the proton-exchanged region is proposed and demonstrated. The waveguides were fabricated and tested at 1.55 mm wavelength. Strongly confined guided modes were obtained. The waveguides are suitable for efficient nonlinear-optic wavelength conversion devices.Introduction: A variety of nonlinear-optic (NLO) wavelength conversion devices using LiNbO 3 waveguides have been demonstrated to date [1]. In most cases, the LiNbO 3 waveguides were fabricated by Ti-indiffusion or anneal/proton-exchange (APE) techniques. Recently, high-efficiency NLO devices using LiNbO 3 thin film ridge waveguides, which exhibit stronger optical confinement, were demonstrated [2 -4]. The LiNbO 3 thin film crystals were formed by adhering or direct bonding of LiNbO 3 crystal on substrate followed by polishing for thinning the crystal. The ridge structures were formed by precise crystal dicing [2], wet etching [5,6] or dry etching [3,4].In this Letter, a new simple method for fabrication of adhered LiNbO 3 ridge waveguides is demonstrated. We used selective etching of the proton-exchanged (PE) region for ridge fabrication. Strongly confined guided modes at 1.55 mm wavelength were obtained.

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Wet etching of proton-exchanged lithium niobate-a novel processing technique

Cited by 80 publications

References 15 publications

A review of lithium niobate modulators for fiber-optic communications systems

A review of lithium niobate modulators for fiber-optic communications systems

Optically pumped planar waveguide lasers, Part I: Fundamentals and fabrication techniques

Fabrication of ridge waveguides in LiNbO ₃ thin film crystal by proton-exchange accelerated etching

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Wet etching of proton-exchanged lithium niobate-a novel processing technique

Cited by 80 publications

References 15 publications

A review of lithium niobate modulators for fiber-optic communications systems

A review of lithium niobate modulators for fiber-optic communications systems

Optically pumped planar waveguide lasers, Part I: Fundamentals and fabrication techniques

Fabrication of ridge waveguides in LiNbO 3 thin film crystal by proton-exchange accelerated etching

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Product

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Fabrication of ridge waveguides in LiNbO ₃ thin film crystal by proton-exchange accelerated etching