Where analytical techniques fall short: a user´s perspective

Abstract

Electronic devices make enormous demands on compositional, structural and elec trical characterization techniques. These demands have catalysed great technique improvements but, despite this, a large and increasing gap exists between demand and supply, especially in the characterization needs of silicon integrated circuits. These needs are outlined, the shortfall in present ID, 2D and 3D analytical capabil ities is quantitatively assessed and a strategy to bridge this gap by combining the best modelling and characterization methods is presented.