White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay Estimation

In this paper we promote a method for the evaluation of a surface's topography which we call the correlogram correlation method. Employing a theoretical analysis as well as numerical simulations the method is proven to be the most accurate among available evaluation algorithms in the common case of uncorrelated noise. Examples illustrate the superiority of the correlogram correlation method over the common envelope and phase methods.

show abstract

Self-elimination of phase noise in coherence scanning interferometry for nano-scale measurement

Zhao²,

Xin³

et al. 2022

Measurement

View full text Add to dashboard Cite

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay Estimation

Cited by 5 publications

References 23 publications

Research on determining the position of zero optical path difference with the wavelet transform

Research on determining the position of zero optical path difference with the wavelet transform

Precision of evaluation methods in white light interferometry. Correlogram correlation method

Self-elimination of phase noise in coherence scanning interferometry for nano-scale measurement

Contact Info

Product

Resources

About