Wide dynamic range direct accelerometer

Henrion, W.; DiSanza, L.; Ip, Maktaz; Terry, S.C.; Jerman, H.

doi:10.1109/solsen.1990.109842

Cited by 92 publications

(55 citation statements)

References 5 publications

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“…If the sensor is rotated around the -axis with an angular rate , the Coriolis force resulting along the -direction on the proof mass is given by (2) The focus of the following discussion, however, is the sensemode control system which consists of an electromechanical . There are several possible choices for the sense control loop: 1) it can be either a low-pass or a bandpass and 2) it can be either a second-order (sensing element only as loop filter) or a high-order .…”

Section: System-level Model Of a Vibratory Gyroscopementioning

confidence: 99%

“…Control systems for micromachined inertial sensors based on a low-pass have been used as an effective control strategy for many years [1]. Most reported sensors to date only use the sensing element as a low-pass noise-shaping filter [2]- [4]. Consequently, due to only second-order noise shaping, the quantization noise is the dominating noise source, which limits the overall performance.…”

Section: Introductionmentioning

confidence: 99%

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Micromachined Vibratory Gyroscopes Controlled by a High-Order Bandpass Sigma-Delta Modulator

2007

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Abstract-This work reports on the design of novel closed-loop control systems for the sense mode of a vibratory-rate gyroscope based on a high-order sigma-delta modulator (61M). A low-pass and two distinctive bandpass topologies are derived, and their advantages discussed. So far, most closed-loop force-feedback control systems for these sensors were based on low-pass 61M's.Usually, the sensing element of a vibratory gyroscope is designed with a high quality factor to increase the sensitivity and, hence, can be treated as a mechanical resonator. Furthermore, the output characteristic of vibratory rate gyroscopes is narrowband amplitude-modulated signal. Therefore, a bandpass 61M is a more appropriate control strategy for a vibratory gyroscope than a low-pass 61M. Using a high-order bandpass 61M, the control system can adopt a much lower sampling frequency compared with a low-pass 61M while achieving a similar noise floor for a given oversampling ratio (OSR). In addition, a control system based on a high-order bandpass 61M is superior as it not only greatly shapes the quantization noise, but also alleviates tonal behavior, as is often seen in low-order 61M control systems, and has good immunities to fabrication tolerances and parameter mismatch. These properties are investigated in this study at system level.

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Section: System-level Model Of a Vibratory Gyroscopementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Micromachined Vibratory Gyroscopes Controlled by a High-Order Bandpass Sigma-Delta Modulator

2007

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“…The Brownian force is Hz [6], which causes Brownian motion of the proof mass m Hz (1) where is the damping coefficient of the proof mass supported by spring constant Solving for the acceleration which generates the same motion and substituting and m/s gives for Brownian equivalent acceleration noise in g/ Hz g Hz (2) From (2), we see that a large mass and high (low damping) are helpful to achieve a low noise floor. To achieve a large mass in a micromachined sensor, one typically uses a wafer-thick proof mass carved from the sensor chip.…”

Section: Theorymentioning

confidence: 99%

“…Traditional vibration sensors using permanent magnets and fine wire coils are called geophones, 1 which measure velocity above the fundamental resonance. This is in contrast to capacitive accelerometers that measure acceleration below their fundamental resonance.…”

Section: Introductionmentioning

confidence: 99%

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Low-noise MEMS vibration sensor for geophysical applications

Bernstein

Miller

Kelley

et al. 1999

J. Microelectromech. Syst.

121

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Abstract-The need exists for high-sensitivity, low-noise vibration sensors for various applications, such as geophysical data collection, tracking vehicles, intrusion detectors, and underwater pressure gradient detection. In general, these sensors differ from classical accelerometers in that they require no direct current response, but must have a very low noise floor over a required bandwidth. Theory indicates a capacitive micromachined silicon vibration sensor can have a noise floor on the order of 100 ng/

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System Level Modeling of Electromechanical Sigma–Delta Modulators for Inertial MEMS Sensors

Kraft

2013

Advanced Micro and Nanosystems

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Wide dynamic range direct accelerometer

Cited by 92 publications

References 5 publications

Micromachined Vibratory Gyroscopes Controlled by a High-Order Bandpass Sigma-Delta Modulator

Micromachined Vibratory Gyroscopes Controlled by a High-Order Bandpass Sigma-Delta Modulator

Low-noise MEMS vibration sensor for geophysical applications

System Level Modeling of Electromechanical Sigma–Delta Modulators for Inertial MEMS Sensors

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