Wide-Range Flexible Capacitive Pressure Sensors Based on Dielectrics with Various Porosity

Yu, Huiyang; Cheng-xi, Guo; Ye, Xin; Pan, Yifei; Tu, Jiacheng; Wu, Zhe; Chen, Zefang; Liu, Xueyang; Huang, Jianqiu; Ren, Qingying; Li, Yifeng

doi:10.3390/mi13101588

Cited by 9 publications

(3 citation statements)

References 47 publications

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“…This morphology may affect thermal dispersion, which in turn leads to the formation of hard segments and an increase in mechanical properties, illustrating that sodium bicarbonate can be applied to improve tear resistance. Currently, most studies use sodium bicarbonate as a foaming agent to study its effect on materials, while ammonium bicarbonate, also a green, inexpensive, heat-decomposable inorganic foaming agent [ 24 ], is seldom used in foaming. Therefore, the addition of inorganic foaming agents such as sodium bicarbonate and ammonium bicarbonate can be used to improve the porosity and mechanical properties of polyurethane polishing pads [ 25 ].…”

Section: Introductionmentioning

confidence: 99%

Effect of Secondary Foaming on the Structural Properties of Polyurethane Polishing Pad

Chen,

Jiang,

Zhu

et al. 2024

Materials

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Polyurethane polishing pads are important in chemical mechanical polishing (CMP). Thus, understanding how to decrease the density but increase the porosity is a crucial aspect of improving the efficiency of a polyurethane polishing pad. According to the principle of gas generation by thermal decomposition of sodium bicarbonate and ammonium bicarbonate, polyurethane polishing pad was prepared by a secondary foaming method. The influence of adding such an inorganic foaming agent as an auxiliary foaming agent on the structure, physical properties, and mechanical properties of polyurethane polishing pads was discussed. The results showed that compared with the polyurethane polishing pad without an inorganic foaming agent, the open-pore structure increased, the density decreased, and the porosity and water absorption increased significantly. The highest porosity and material removal rate (MRR) with sodium bicarbonate added was 3.3% higher than those without sodium bicarbonate and 33.8% higher than those without sodium bicarbonate. In addition, the highest porosity and MRR with ammonium bicarbonate were 7.2% higher and 47.8% higher than those without ammonium bicarbonate. Therefore, it was finally concluded that the optimum amount of sodium bicarbonate to be added was 3 wt%, and the optimum amount of ammonium bicarbonate to be added was 1 wt%.

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Section: Introductionmentioning

confidence: 99%

Effect of Secondary Foaming on the Structural Properties of Polyurethane Polishing Pad

Chen,

Jiang,

Zhu

et al. 2024

Materials

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“…However, when subjected to pressure loads above 1 MPa, the sensitivity of the sensor was only 0.001 kPa −1 . Yu et al 33 found that compared to media with uniform porosity, sensors based on media with different porosities have higher sensitivity (0.032 kPa −1 ) and a wider pressure detection range, which can detect pressures ranging from 0 to 1200 kPa. Shi et al 34 demonstrated a novel flexible capacitive pressure sensor with a microstructure composite dielectric layer (MCDL).…”

Section: Introductionmentioning

confidence: 99%

A Flexible Capacitive Pressure Sensor with Adjustable Detection Range Based on the Inflatable Dielectric Layer for Human–Computer Interaction

Li,

Chen,

Zhang

et al. 2024

ACS Appl. Mater. Interfaces

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As an essential component in wearable electronic devices and intelligent robots, flexible pressure sensors have enormous application value in fields such as healthcare, human−computer interaction, and intelligent perception. However, due to the complex and ever-changing pressure loads borne by sensors in different application scenarios, this also puts great demands on the flexible response and adjustment ability of a sensor's detection range. Therefore, developing a flexible pressure sensor with a wide and adjustable detection range, which can be applied flexibly under different pressure loads, is also a major challenge in current research. In this paper, we propose a flexible pressure sensor with a wide and adjustable detection range based on an inflatable adjustable safety airbag as the dielectric layer. This sensor uses inflatable airbags prepared using 3D printing technology and silicone reverse molding technology as the dielectric layer and achieves high sensitivity (0.6 kPa −1 to 1.19 kPa −1 ), wide detection range (220−1500 kPa), and flexible performance applicability by adjusting the air pressure inside the dielectric layer. At the same time, its simple production process, convenient production, fast response time (100 ms), and good stability provide the possibility for the flexible application of sensors in different pressure detection. The experimental results indicate that the sensor has enormous potential for applications in wearable devices, healthcare, human−computer interaction, and intelligent perception recognition.

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“…However, at large applied pressures, the deformation of the surface microstructure reaches its limit, and it is difficult for the sensor to realize a wide detection range. To improve the large deformation capability of the dielectric layer, a porous structured substrate (e.g., foam, sponge) is used [ 26 , 27 , 28 ]. This high porosity makes it easy for the sensor to deform under pressure and enables the pressure sensor to have a wide range of capabilities.…”

Section: Introductionmentioning

confidence: 99%

Flexible Capacitive Pressure Sensor Based on a Double-Sided Microstructure Porous Dielectric Layer

Zhang²

2022

Micromachines

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In the era of intelligent sensing, there is a huge demand for flexible pressure sensors. High sensitivity is the primary requirement for flexible pressure sensors, whereas pressure response range and resolution, which are also key parameters of sensors, are often ignored, resulting in limited applications of flexible pressure sensors. This paper reports a flexible capacitive pressure sensor based on a double-sided microstructure porous dielectric layer. First, a porous structure was developed in the polymer dielectric layer consisting of silicon rubber (SR)/NaCl/carbon black (CB) using the dissolution method, and then hemisphere microstructures were developed on both sides of the layer by adopting the template method. The synergistic effect of the hemispheric surface microstructure and porous internal structure improves the deformability of the dielectric layer, thus achieving high sensitivity (3.15 kPa−1), wide response range (0–200 kPa), and high resolution (i.e., the minimum pressure detected was 27 Pa). The proposed sensing unit and its array have been demonstrated to be effective in large-area pressure sensing and object recognition. The flexible capacitive pressure sensor developed in this paper is highly promising in applications of robot skin and intelligent prosthetic hands.

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Wide-Range Flexible Capacitive Pressure Sensors Based on Dielectrics with Various Porosity

Cited by 9 publications

References 47 publications

Effect of Secondary Foaming on the Structural Properties of Polyurethane Polishing Pad

Effect of Secondary Foaming on the Structural Properties of Polyurethane Polishing Pad

A Flexible Capacitive Pressure Sensor with Adjustable Detection Range Based on the Inflatable Dielectric Layer for Human–Computer Interaction

Flexible Capacitive Pressure Sensor Based on a Double-Sided Microstructure Porous Dielectric Layer

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