X‐Ray Fluorescence Elemental Imaging

Abstract

X‐ray fluorescence (XRF) imaging is a valuable analytical technique that provides elemental distribution maps. XRF imaging can be categorized as scanning‐type and non‐scanning‐type, that is full‐filed XRF imaging using a two‐dimensional X‐ray detector. Advanced X‐ray focusing optics produce a micro X‐ray beam in the laboratory, leading to scanning micro‐XRF analysis and XRF imaging. A confocal micro‐XRF technique has been applied to visualize the elemental distributions in the samples. The fundamentals and applications of the scanning‐type XRF imaging techniques are also introduced. Thereafter, two full‐field XRF imaging techniques are explained, that is, wavelength‐dispersive XRF (WDXRF) imaging and energy‐dispersive XRF (EDXRF) imaging. In addition, the characteristics of these XRF imaging techniques are compared.