2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems 2013
DOI: 10.1109/transducers.2013.6626842
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X-Y and Z-axis capacitive accelerometers packaged in an ultra-clean hermetic environment

Vu A. Hong
1
,
B. J. Lee
2
,
David L. Christensen
3
et al.
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