2012
DOI: 10.1002/sia.4943
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XPS composition study of stacked Si oxide/Si nitride/Si oxide nano‐layers

Abstract: X‐ray Photoelectron Spectroscopy (XPS) was used to investigate the silicon nitride composition in stacked Si oxide/Si nitride/Si oxide nano‐layers. The standard approach for stoichiometry estimation, valid for homogeneous compositions, was corrected for the case of very small thickness and thin overlayer. Copyright © 2012 John Wiley & Sons, Ltd.

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Cited by 19 publications
(9 citation statements)
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“…Both Bi 3+ and Mo 6+ exist in Bi 2 MoO 6 . Figure d shows the peak of Si in vermiculite, which correspond to Si 2p at 102.37 eV . As shown in Figure e, O 1s spectrum can be divided into two different peaks of 531.2 and 531.5 eV, which are related to Bi−O and Mo−O bonds in Bi 2 MoO 6 .…”
Section: Resultssupporting
confidence: 78%
See 1 more Smart Citation
“…Both Bi 3+ and Mo 6+ exist in Bi 2 MoO 6 . Figure d shows the peak of Si in vermiculite, which correspond to Si 2p at 102.37 eV . As shown in Figure e, O 1s spectrum can be divided into two different peaks of 531.2 and 531.5 eV, which are related to Bi−O and Mo−O bonds in Bi 2 MoO 6 .…”
Section: Resultssupporting
confidence: 78%
“…Figure 3d shows the peak of Si in vermiculite, which correspond to Si 2p at 102.37 eV. [44,45] As shown in Figure 4e, O 1s spectrum can be divided into two [46] Two signals can be found in Figure 3f at 368.52 and 374.62 eV, which are attributed to Ag 3d 5/2 and Ag 3d 3/2 , revealing the formation of Ag + in the AgI. [36] Figure 3g shows XPS spectrum of I 3d, and the signals at 619.82 and 631.32 eV are assigned to I 3d 5/2 and I 3d 3/2 , respectively.…”
Section: Structure Of the Compositesmentioning
confidence: 99%
“…[ 20 ] The component peak at 102.2 eV in the Si 2 p spectrum is attributed to Si─N bond. [ 21,22 ] The component peak at 397.5 eV in the N 1 s spectrum is attributed to N─Si bond. [ 23 ]…”
Section: Resultsmentioning
confidence: 99%
“…The Si-C component of the Si 2p 3/2 peak at 100.5 eV was used as a reference for charge compensation [20]. The component peak at 102.2 eV in the Si 2p spectrum is attributed to Si─N bond [21,22]. The component peak at 397.5 eV in the N 1s spectrum is attributed to N─Si bond [23].…”
mentioning
confidence: 99%
“…The Si 2p spectrum presented two characteristic peaks at 99 eV and 103.3 eV, which corresponded to monatomic silicon and SiO 2 , respectively (Fig. 2e) [27]. During the production of some polymer materials, to ensure their mechanical properties and ame retardancy, CaCO 3 , SiO 2 , and other inorganic llers are often added to the glues, rubbers, and other polymeric materials.…”
Section: Resultsmentioning
confidence: 99%