(ZrO2)x(La2O3)1-x Alloy as High-k Gate Dielectric for Advanced CMOS Devices

Hou, Chin-Yao; Chen, Lun-Lun; Wu, Jia-Rong; Wu, Min-Lin; Lyu, Rong-Jhe; Wu, Yung-Hsien

doi:10.1149/ma2010-02/22/1503

Meet. Abstr.

2010

DOI: 10.1149/ma2010-02/22/1503

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(ZrO₂)_x(La₂O₃)_1-x Alloy as High-k Gate Dielectric for Advanced CMOS Devices

Chin-Yao Hou,

Lun-Lun Chen,

Jia-Rong Wu

et al.

Abstract: not Available.

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(ZrO₂)_x(La₂O₃)_1-x Alloy as High-k Gate Dielectric for Advanced CMOS Devices

Abstract: not Available.

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References 6 publications

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