Влияние Температуры Мишени На Образование Нанорельефа При Облучении Газовыми Кластерными Ионами

Abstract

A study of the nanorelief formed on the surface of copper under the influence of an oblique beam of cluster ions at various fluences and target temperatures was carried out. The resulting nanorelief develops into an ordered wave-like structure with increasing fluence. It was found that with an increase in the target temperature, the initial roughness is smoothed. The mechanisms responsible for the formation of surface topography are indicated, and estimates of their effectiveness are made.