中国激光
 2024
DOI: 10.3788/cjl231234
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基于国产商用CLBO晶体的高转换效率、高功率深紫外266 nm激光

俞航航 Yu Hanghang,
张志韬 Zhang Zhitao,
玄洪文 Xuan Hongwen

Abstract: Objective Deepultraviolet (DUV) lasers have important applications in fields such as laser processing and semiconductor

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