The nebulization of colloidal suspensions is analyzed by dynamic light scattering, scanning, and transmission electron microscopies. While primary agglomeration can be important for many nanoparticle-solvent couples, our results indicate that for TiO 2 nanoparticles dispersed in water, secondary agglomeration also occurs during nebulization. When nebulization is realized immediately after sustaining a plane-toplane dielectric barrier discharge at atmospheric pressure, the collection efficiency of TiO 2 nanoparticles increases due to the presence of a remanent electric field between the two electrodes. Finally, these findings are used to deposit SiO 2 -TiO 2 nanocomposite thin films by alternating the deposition of dense silicalike layers in a Townsend discharge and the collection of TiO 2 nanoparticles through nebulization of the nanocolloidal suspension.