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A novel Si-based X'tal oscillator device (1.2 mm x 1.0 mm) is demonstrated by using 3D integration technologies. It is distinct from conventional X'tal oscillator device with ceramics and metal lid. The novel Si-based X'tal oscillator device shows no leakage path, and passes the hermetic encapsulation test and reliability investigation. In addition, the novel device shows the excellent electrical characteristics and provides the possibility to replace the conventional fabrication approach for the next generation products.

Abstract-In recent years, demand for quartz crystal resonators continues to grow for the mobile phone market. To meet the stringent long-term frequency stability requirement, crystal makers usually use Au as the electrode baseplating material. Using layered electrodes with different metallic materials was reported in the past for different reasons. In this paper we report our own study of using a sputtered Cr/Ag/Au layered structure for the electrodes of AT-cut quartz crystal resonators with the sole intention of reducing the usage of Au for cost reason. We studied the physical parameter, electrical sheet resistance, of the layers along with thermal processes.The electrical characteristics of finished crystal resonators were compared with those made with the Cr/Au baseplated electrodes and the reliability performance of the crystals with new electrodes also be examined. Preliminary results show that AT-cut quartz crystal resonators with electrodes based on the Cr/Ag/Au layered structure meet the long-term frequency stability requirement for mobile phone application. The electrical characteristics are compatible to the Cr/Au baseplated crystal resonators. The physical characteristics study shows that the Cr/Ag/Au layered structure is stable under related thermal process environments.