International audienceThis paper presents a successful design, realization,and characterization of single-mode rib optical waveguides on SOG/SU-8 polymers in order to highlight a new approach to designing heat sensors. The basic principle of this new thermal-sensing method relies on the differential thermal behavior regarding both acting arms of a micro Mach-Zehnder Interferometer(MZI). First, two families of single-mode straight rib waveguides composed of SOG/SU-8 polymers are analyzed. Hence, optical losses for TE00 and TM00 optical modes for structures on Si/SiO2/SU-8 have been estimated respectively as 1,36 plusmn 0,02 and 2,01plusmn0,02 dBmiddotcm-1, while the second one composed of Si/SiO2 /SOG/SU-8 presented losses of 2,33 plusmn 0,02 and 2,95plusmn0,02 dBmiddotcm-1. Then, owing to modeling results, an experimental sensor is realized as an integrated device made up of SU-8 polymer mounted on a standard silicon wafer. When subjected to a radiant source, as a laser light (980 nm) is injected across the cleaved input face of the MZI, the significant change of output signal allows us to consider a new approach to measuring radiant heat flowrate. Experimental results are given regarding the obtained phase shift against the subjected thermal power. According to the modeling results, one can expect new highly sensitive devices to be developed in the next coming years, with advantageous prospective industrial application

Heat flow transducers have been implemented within a thermometric fixed-point cell operated with indium. Then a local heat flow rate was monitored simultaneously with the classical temperature measurement. A specific configuration, so-called cell-within-cell, allowed us to control a melting transition plateau and to observe the behaviour of the heat exchanged during the whole process of the melting transition. Owing to their dynamic character, heat flow measurements prove to be the most appropriate for defining specific boundaries on a given transition plateau, and relevant sensors are found to be suitable tools to be coupled with enhanced temperature measurements. This piece of work is presented in two parts, with the description of the set-up and measurement results in this first paper and their subsequent thermodynamic implications in the following one.

International audienceIn this paper, a new approach to designing fast micro-psychrometers devoted to measuring relative humidity is presented. Such devices are based on a planar thermopile fitted with an appropriate set of microchannels arranged for monitoring the evaporation process as a Seebeck voltage. They are fabricated out of a glass substrate, sputtered metals, and near vertical side walls made of SU-8, according to standard microtechnology processes for MEMs. Considering classical psychrometers, the new design is aimed at reducing both size and response time. Thus, besides being far less invasive than a standard unit, fast measurements (tau=5 s) are enabled. A straightforward modeling, aimed at deriving the relative humidity, is given with a view to integrating the signal conditioner. As regards validation, a prototype is calibrated and compared to a reference probe, and a discussion on its enhancement is also presented