In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiNx waveguides are useful in differential sensing applications. Photonic crystal cavities and microdisk resonators based on chalcogenide glasses for high sensitivity are also demonstrated as effective mid-IR sensors. Polymer-based functionalization layers, to enhance the sensitivity and selectivity of our sensor devices, are also presented. We discuss the design of mid-IR chalcogenide waveguides integrated with polycrystalline PbTe detectors on a monolithic silicon platform for optical sensing, wherein the use of a low-index spacer layer enables the evanescent coupling of mid-IR light from the waveguides to the detector. Finally, we show the successful fabrication processing of our first prototype mid-IR waveguide-integrated detectors.
We demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2×10(5) at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits.
Thermally-induced nucleation and growth of secondary crystalline phases in a parent glass matrix results in the formation of a glass ceramic. Localized, spatial control of the number density and size of the crystal phases formed can yield 'effective' properties defined approximately by the local volume fraction of each phase present. With spatial control of crystal phase formation, the resulting optical nanocomposite exhibits gradients in physical properties including gradient refractive index (GRIN) profiles. Micro-structural changes quantified via Raman spectroscopy and X-ray diffraction have been correlated to calculated and measured refractive index modification verifying formation of an effective refractive index, n eff , with the formation of nanocrystal phases created through thermal heat treatment in a multi-component chalcogenide glass. These findings have been used to define experimental laser irradiation conditions required to induce the conversion from glass to glass ceramic, verified using simulations to model the thermal profiles needed to substantiate the gradient in nanocrystal formation. Pre-nucleated glass underwent spatially varying nanocrystal growth using bandgap laser heating, where the laser beam's thermal profile yielded a gradient in both resulting crystal phase formation and refractive index. The changes in the nanocomposite's micro-Raman signature have been quantified and correlated to crystal phases formed, the material's index change and the resulting GRIN profile. A flat, threedimensional (3D) GRIN nanocomposite focusing element created through use of this approach, is demonstrated.
A reconfigurable metasurface made of Ge 2 Sb 2 Te 5 phase-change material was experimentally demonstrated in the 1.55 μm wavelength range. A nanostructured Ge 2 Sb 2 Te 5 film on fused silica substrate was optimized to switch from highly transmissive (80%) to highly absorptive (76%) modes with a 7:1 contrast ratio in transmission independent of polarization, when thermally transformed from the amorphous to crystalline state. The metasurface was designed using a genetic algorithm optimizer linked with an efficient fullwave electromagnetic solver.
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