We demonstrate a fully integrated extended distributed Bragg reflector (DBR) laser with ∼1 kHz linewidth and over 37 mW output power, as well as a ring-assisted DBR laser with less than 500 Hz linewidth. The extended DBR lasers are fabricated by heterogeneously integrating III-V material on Si as a gain section plus a 15 mm long, low-kappa Bragg grating reflector in an ultralow-loss silicon waveguide. The low waveguide loss (0.16 dB/cm) and long Bragg grating with narrow bandwidth (2.9 GHz) are essential to reducing the laser linewidth while maintaining high output power and single-mode operation. The combination of narrow linewidth and high power enable its use in coherent communications, RF photonics, and optical sensing.

We demonstrate a distortion free tunable optical delay as long as 135 ps with a 10 GHz bandwidth using thermally tuned silicon microring resonators in the novel balanced configuration. The device is simple, easy to control and compact measuring only 30 µm wide by 250 µm long.

Silicon nitride (Si 3 N 4 ), as a complementary metal-oxide-semiconductor (CMOS) material, finds wide use in modern integrated circuit (IC) technology. The past decade has witnessed tremendous development of Si 3 N 4 in photonic areas, with innovations in nonlinear photonics 1 , optical sensing 2 , etc. However, the lack of an integrated laser with high performance prohibits the large-scale integration of Si 3 N 4 waveguides into complex photonic integrated circuits (PICs). Here, we demonstrate a novel III-V/Si/Si 3 N 4 structure to enable efficient electrically pumped lasing in a Si 3 N 4 based laser external cavity. The laser shows superior temperature stability and low phase noise compared with lasers purely dependent on semiconductors. Beyond this, the demonstrated multilayer heterogeneous integration provides a practical path to incorporate efficient optical gain with various low-refractive-index materials. Multilayer heterogeneous integration could extend the capabilities of semiconductor lasers to improve performance and enable a new class of devices such as integrated optical clocks 3 and optical gyroscopes.

Silicon nitride (SiN) waveguides with ultra-low optical loss enable integrated photonic applications including low noise, narrow linewidth lasers, chip-scale nonlinear photonics, and microwave photonics. Lasers are key components to SiN photonic integrated circuits (PICs), but are difficult to fully integrate with low-index SiN waveguides due to their large mismatch with the high-index III-V gain materials. The recent demonstration of multilayer heterogeneous integration provides a practical solution and enabled the first-generation of lasers fully integrated with SiN waveguides. However, a laser with high device yield and high output power at telecommunication wavelengths, where photonics applications are clustered, is still missing, hindered by large mode transition loss, non-optimized cavity design, and a complicated fabrication process. Here, we report high-performance lasers on SiN with tens of milliwatts output power through the SiN waveguide and sub-kHz fundamental linewidth, addressing all the aforementioned issues. We also show Hertz-level fundamental linewidth lasers are achievable with the developed integration techniques. These lasers, together with high-Q SiN resonators, mark a milestone towards a fully integrated low-noise silicon nitride photonics platform. This laser should find potential applications in LIDAR, microwave photonics and coherent optical communications.

This paper presents recent results on widely-tunable narrow-linewidth semiconductor lasers using a ring-resonator based mirror as the extended cavity. Two generations of lasers on the heterogeneous Si/InP photonic platform are presented. The first-generation lasers, with a total footprint smaller than 0.81 mm 2 , showed an intrinsic linewidth of ∼2 kHz over a 40 nm wavelength tuning range across C+L bands. The second-generation lasers using ultra-low loss silicon waveguides and a novel cavity design achieved an intrinsic linewidth below 220 Hz. The lasers also possess an ultrawide wavelength tuning range of 110 nm across three optical communication bands (S+C+L). These are records among all fully integrated semiconductor lasers reported in the literature.