1.1.4 MEMS Pirani type vacuum sensor with extended sensitivity range

Simon, Maik; Dütsch, C.; Schieferdecker, J.; Storck, K.; Völklein, F.; Grau, Mario

doi:10.5162/sensoren2012/1.1.4

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2023

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“…The other is switching multi-sensors with different pressure ranges. Simon et al incorporated two sensors with pressure ranges of 10 −3 ∼ 10 2 Pa and 10 2 ∼ 10 5 Pa in a single package [15]. Lai et al and Li et al performed similar works [16,17].…”

Section: Introductionmentioning

confidence: 99%

A combined MEMS thermal vacuum sensor with a wide pressure range

Yuan,

Fu,

et al. 2023

J. Micromech. Microeng.

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MEMS thermal vacuum sensors have been widely applied in many academic and industry fields, and pressure range is a key performance of MEMS thermal vacuum sensors. To extend the pressure range, a combined MEMS thermal vacuum sensor that consists of two diode-type MEMS thermal vacuum sensors in series is proposed in this work. The two diode-type sensors are designed to have different areas of sensitive region and distances between sensitive region and heat sink, and their responses to the pressure are from 3.0 × 10−3 to 3 × 104 Pa and from 1.7 × 10−2 to 4.4 × 105 Pa, respectively. By series-connecting them, the combined sensor achieves a pressure range of 1.3 × 10−3 to 6.9 × 105 Pa without any additional control circuit. In addition, it possesses a relatively small size of 400 × 300 μm2. These indicate that the combined MEMS thermal vacuum sensor has the characteristics of wide pressure range, high sensitivity and small size.

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Section: Introductionmentioning

confidence: 99%