2014
DOI: 10.1016/j.tsf.2013.12.047
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1,2,4-Triazole as a corrosion inhibitor in copper chemical mechanical polishing

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Cited by 84 publications
(43 citation statements)
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“…Benzimidazole is a heterocyclic aromatic organic compound with a bicyclic structure consisting of the fusion of benzene and imidazole rings [10], and hydrogen atoms on the rings can be substituted by other groups or atoms. Some derivatives of benzimidazole have been demonstrated as excellent inhibitors [22][23][24][25][26][27] for copper and its alloys in acidic solution, and exhibit different inhibition performance with the difference in substituent groups and substituent positions on the imidazole ring [21,28,29]. Thus, benzimidazoles are N-and O-containing compounds and good electron donors; this will enhance their adsorption on the surface of the copper metal and increase binding capabilities.…”
Section: Introductionmentioning
confidence: 99%
“…Benzimidazole is a heterocyclic aromatic organic compound with a bicyclic structure consisting of the fusion of benzene and imidazole rings [10], and hydrogen atoms on the rings can be substituted by other groups or atoms. Some derivatives of benzimidazole have been demonstrated as excellent inhibitors [22][23][24][25][26][27] for copper and its alloys in acidic solution, and exhibit different inhibition performance with the difference in substituent groups and substituent positions on the imidazole ring [21,28,29]. Thus, benzimidazoles are N-and O-containing compounds and good electron donors; this will enhance their adsorption on the surface of the copper metal and increase binding capabilities.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, development of high-performance inhibitors for controlling copper corrosion in environments containing chloride medium and under wet-dry alternation becomes a technical challenge. Generally, organic compounds can be modified to improve the strength of their adsorption bonds to the protected metals, providing a promising alternative for corrosion inhibition [25][26][27][28].…”
Section: Introductionmentioning
confidence: 99%
“…From the XPS survey spectra (Figure d), the N1s signal is observed for TTC‐Cu surface (Figure d2). As is shown in the N1s spectra for TTC‐Cu surface (Figure e2), the N1s peak is decomposed into two components centered at 399.6 and 401.6 eV, matching with the peak of Cu‐N and =N + H − group in the assembled TTC molecule, respectively. The presence of Cu‐N can be verified by the Cu2p spectra for TTC‐Cu surface (Figure f2), the bonding energy at 933.2 eV corresponds to the [Cu(I)‐azole] compound.…”
Section: Resultsmentioning
confidence: 59%