“…However, with the above-mentioned technologies, there are many problems such as a low decomposition efficiency, high operating cost, and the formation of by-products: NO x , SO x , HF, CO 2 , etc (Mi et al, 2015;Park et al, 2013;Wang et al, 2004;Bonarowska et al, 2001;Wang et al, 1998). Afterward, the plasma process and electronbeam system have been exploited for improving previous technologies (Son et al, 2016;Ryu et al, 2012;Watanabe et al, 2008;Kossyi et al, 2001;Glocker et al, 2000;Murphy et al, 1998). Meanwhile, Park et al (2013) reported that the plasma process obtained a high decomposition efficiency of PFCs when using hydrogen gas as an addictive.…”