1.6 Precision Grinding, Lapping, Polishing, and Post-Processing of Optical Glass

Li, Yaguo; Zhang, Qinghua; Wang, Jian; Xu, Qiao; Ye, Hui

doi:10.1016/b978-0-12-803581-8.09152-9

Cited by 23 publications

(1 citation statement)

References 84 publications

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“…Nowadays, numerous manufacturing (cf. [1]) and measuring (see [2][3][4][5]) devices are available, for example, for simple optics with low asphericity. For highly aspherical objects or unconventional optics, however, the range of available products is much smaller (cf.…”

Section: Introductionmentioning

confidence: 99%

Precision Measurement of Complex Optics Using a Scanning-Point Multiwavelength Interferometer Operating in the Visible Domain

Wendel

2023

Nanomanuf Metrol

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The growing demands of optical systems have led to increasingly complex aspheres and freeforms. In this paper, an established measurement system in asphere production, which is also a promising approach in high-precision freeform metrology, is presented. It is based on a scanning-point multiwavelength interferometer approach. The scanning principle enables great flexibility, reduces setup time and costs, and has almost no limitations in spherical departure. Due to the absolute measurement capability, the utilized multiwavelength approach is beneficial for segmented, annular, and discrete surfaces, which are common designs of modern applications’ optical elements. The metrology system enables measurements on a nanometer scale on a great variety of apertures—from 1 to 1000 mm. Recently, a new short-coherence multiwavelength interferometer operating in the visible domain has been developed. It enables the high-precision measurement on silicon-coated surfaces, which can be found in space applications and are also commonly used for extreme-ultraviolet (EUV) lithographic setups, which will be used as an example throughout this work. Owing to the large absolute measurement capability, applied grating structures for suppressing infrared light in the EUV process can easily be measured. This paper summarizes the basic working principles of the proposed metrology system, explains the special requirements for different fields of application, highlights the capabilities of the visible multiwavelength approach, and shows the measurement results.

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Section: Introductionmentioning

confidence: 99%

Precision Measurement of Complex Optics Using a Scanning-Point Multiwavelength Interferometer Operating in the Visible Domain

Wendel

2023

Nanomanuf Metrol

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A real-time dressing method for metal lapping pads based on the thermal deformation effect

Zhao

Wang

et al. 2022

Int J Adv Manuf Technol

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The surface shape and accuracy of the metal lapping pad are important factors that affect the performance of the lapping process for flat optical components. A real-time control system for metal-lapping-pad surface shape (RCLPS) based on the bimetal thermal-deformation effect is proposed. Unlike traditional dressing methods (e.g., turning dressing with a diamond tool), real-time dressing based on the RCLPS system is a material-loss-free and in-process dressing method. A full-aperture lapping turntable based on the RCLPS system was designed, and the working heat was analyzed. A thermal-deformation model was established through regression analysis. Finally, experiments were conducted to verify the functionality of the RCLPS system. During turning dressing (turntable rotational speed n m = 100 rpm), the thermal-deformation error caused by the working heat of the turntable-shaft system was compensated by the RCLPS system. During the lapping process for optical elements (n m ≤ 20 rpm), the real-time dressing of the lapping-pad surface shape was controlled by the coolant temperature of the RCLPS system, permitting optimization and adjustment of the process performance of the plane optical component. The effectiveness and practicality of the RCLPS system were demonstrated experimentally.

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Iron-particle-polishing-tool behavior during magnetic field-assisted finishing of fused silica

Long

Kamimura

Marui

et al. 2022

CIRP Journal of Manufacturing Science and Technology

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1.6 Precision Grinding, Lapping, Polishing, and Post-Processing of Optical Glass

Cited by 23 publications

References 84 publications

Precision Measurement of Complex Optics Using a Scanning-Point Multiwavelength Interferometer Operating in the Visible Domain

Precision Measurement of Complex Optics Using a Scanning-Point Multiwavelength Interferometer Operating in the Visible Domain

A real-time dressing method for metal lapping pads based on the thermal deformation effect

Iron-particle-polishing-tool behavior during magnetic field-assisted finishing of fused silica

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