1 THz Micromachined Waveguide Band-Pass Filter

Liu, Shuang; Hu, Jian; Zhang, Yong; Zheng, Zhongwan; Liu, Yupeng; Xu, Ruimin; Xue, Quan

doi:10.1007/s10762-015-0229-6

Cited by 20 publications

(7 citation statements)

References 24 publications

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“…This work was supported by the UK Engineering and Physical Science Research Council (EPSRC) under Contract EP/ M016269/1. 3D SLA printing >100:1 <25 1 µm (R RMS ) serial [12] 3D SLS printing >15:1 <100 6 µm (R a ) serial [13] CNC machining >5:1 <2 75 nm (R a ) serial [7] DRIE process >30:1 <2 100 nm (R RMS ) batch [19] electroforming >20:1 <1 300 nm (R RMS ) batch [8] hot embossing >7:1 <25 135 nm (R RMS ) batch [46,47] SU-8 process >20:1 <2 40-50 nm (R RMS ) batch [33] laser machining >3:1 <10 1.5 µm (R a ) serial [44,45] [49] f o (GHz) is the centre frequency of the filter, FBW (%) is the fractional bandwidth, n is the filter order; IL (dB) is the passband insertion loss, RL (dB) is the passband return loss.…”

Section: Acknowledgmentsmentioning

confidence: 99%

Submillimeter‐wave waveguide filters fabricated by SU‐8 process and laser micromachining

Shang

Yang

Glynn

et al. 2017

IET Microwaves, Antennas & Propagation

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For terahertz systems, rectangular waveguide is an ideal low loss medium for interconnectivity and the construction of passive circuits. A drawback when manufacturing waveguides at submillimeter wavelengths is the demanding tolerances due to small dimensions. For example a WR-3 waveguide (operating between 220 and 325 GHz) has a cross-sectional dimension of just 864 by 432 µm, and higher frequency waveguides get proportionally smaller. An additional challenge is that if using waveguide for passive circuits such as filters, there are additional structures inside the waveguide which are significantly smaller than the waveguide itself. Traditionally, computer numerical control (CNC) milling has been used for waveguides, however at terahertz frequencies this is difficult to utilise. In this paper emerging technologies for terahertz waveguides are compared with conventional CNC solutions. The technologies include the photolithography based polymer etching of waveguides using SU-8 photoresist, and the laser machining of metal. Both have shown promise, and good quality terahertz passive components have been fabricated and measured.

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Section: Acknowledgmentsmentioning

confidence: 99%

Submillimeter‐wave waveguide filters fabricated by SU‐8 process and laser micromachining

Shang

Yang

Glynn

et al. 2017

IET Microwaves, Antennas & Propagation

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“…Consequently, it is important that the structures to be realized are in harmony with the manufacturing approach to mitigate this problem and reduce the reject rate in the production of these components. Apart from CNC milling, the deep reactive ion etching (DRIE) approach as well as the SU-8 photoresist technique have proven to be suitable for the realization of filters up to the terahertz regime [3], [4], [5]. In both approaches, individually structured layers are stacked above each other.…”

Section: Introductionmentioning

confidence: 99%

Quasi-Elliptical Stub-Based Multi-Resonance Waveguide Filters With Low Manufacturing Complexity for mm-Wave Applications

et al. 2023

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In this paper, the design and realization of quasi-elliptical waveguide filters with reduced manufacturing complexity are discussed. The filters are based on TE mode cavities, which are loaded with TM mode stubs. It is shown that dual-, triple-and quadruple-resonance segments are obtained by using up to three stubs loaded on the broad side of a TE mode cavity. The structures obtained can either be used as a stand-alone filter or even as a building block suitable for the realization of higher order filters. The multiresonance blocks reveal several advantages in the mm-wave area: The manufacturing complexity is easy to handle and comparable to simple all-pole filters, which is especially important at high frequencies. Therefore, three prototypes are manufactured as proof of concept in the D-band (110 GHz-170 GHz). Moreover, the building blocks are able to produce n − 1 transmission zeros (TZs) with n being the number of resonances. Therefore, the blocks generate between one (dual-resonance) and up to three (quadruple-resonance) TZs. Advantageously, the filters can be cut in the E-plane in order to reduce the insertion loss and hence consist of only two components. Three examples are manufactured by high precision CNC milling and reveal good agreement to the simulation by obtaining unloaded Q-factors of up to 1000.INDEX TERMS D-band filter, E-plane cut, high precision CNC milling, reduced manufacturing complexity, TM mode stub.

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“…1, the filter comprised of two dual-mode resonant cavities, two standard waveguide interfaces and three pairs of round corner irises. Each dual-mode cavity supposed a pair of degenerate modes TE102/TE301 can generate two transmission poles and one transmission zero [10,11]. In the case of the filter structure in Fig.…”

mentioning

confidence: 99%

“…The dimensions of the coupling irises must be determined to fulfil the filter specifications. In former design, the right angle irises were used extensively for coupling between adjacent resonant cavities [11,12]. For obtaining smaller effective irises thickness and aspect ratio, consequently reducing manufacture difficulty, the round corner irises are adopted in these filters to substitute for the right angle irises.…”

mentioning

confidence: 99%

Dual‐mode band‐pass filters made by SU‐8 micromachining technology for terahertz region

et al. 2017

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Two four‐order dual‐mode rectangular waveguide filters centred at 100 GHZ with return loss all better than −19 dB are presented. The filters consist of two cascade resonant cavities suppose TE102/TE301 degenerate modes and three pairs of round corner inductive irises symmetrical with waveguide. Since the introduction of round corner irises and dual‐mode cavities, the filter structures have lower aspect ratio and less resonant cavities, thus the difficulty of fabrication sharply reduced. Single zero exists at the one side of pass‐band because of the same width of two resonant cavities. All the other parameters constant except for the widths of two cavities slightly unequal, two distinct transmission zeros can generate at the same side of pass‐band. UV lithography technology with SU‐8 photo‐resist is used for the fabrication of filters. On the whole, results from measurement are in good agreement with simulation, which fully confirm the validity of design and fabrication methods.

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1 THz Micromachined Waveguide Band-Pass Filter

Cited by 20 publications

References 24 publications

Submillimeter‐wave waveguide filters fabricated by SU‐8 process and laser micromachining

Submillimeter‐wave waveguide filters fabricated by SU‐8 process and laser micromachining

Quasi-Elliptical Stub-Based Multi-Resonance Waveguide Filters With Low Manufacturing Complexity for mm-Wave Applications

Dual‐mode band‐pass filters made by SU‐8 micromachining technology for terahertz region

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