10–25 GHz frequency reconfigurable MEMS 5-bit phase shifter using push–pull actuator based toggle mechanism

Dey, Sukomal; Koul, Shiban K.

doi:10.1088/0960-1317/25/6/065011

Cited by 13 publications

(8 citation statements)

References 27 publications

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“…Different types of phase shifters have been reported in the literature over last two decades [6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23] in narrowband or wideband. One of the major challenges of a wideband phase shifter is to track any frequency over a wide spectrum without compromising other performances like loss, matching, and phase error.…”

Section: Introductionmentioning

confidence: 99%

17-30 GHZ Reliable and Compact Analog Phase Shifter Using Lateral Micromachined Sp7t Switches, and DMTL Arrays

Dey¹,

Koul²,

Poddar³

et al. 2021

PIER C

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Section: Introductionmentioning

confidence: 99%

17-30 GHZ Reliable and Compact Analog Phase Shifter Using Lateral Micromachined Sp7t Switches, and DMTL Arrays

Dey¹,

Koul²,

Poddar³

et al. 2021

PIER C

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“…However, due to the limited control range of the bridge traveling distance (or say beam defection) before the bridge pull‐in, analog phase shifters show relatively small phase shifts. Digital MEMS phase shifters are generally categorized into four basic types: reflected type, 17 switched line, 18 loaded line, 19 and distributed MEMS transmission line (DMTL) 20–32 . Many studies have focused on DMTL phase shifters because of their simple modeling, very wideband performance, and high‐frequency operation.…”

Section: Introductionmentioning

confidence: 99%

“…Four‐ and five‐bit DMTL phase shifters are introduced by Chen et al 26 and Du et al 27 with sizes of 12 and 20.46 mm, respectively. Later, a five‐bit DMTL phase shifter is presented by Dey and Koul 28 using push‐pull actuator‐based toggle mechanism. The designed phase shifter is operated over the 10 to 25 GHz range with a total area of 15.6 mm 2 for specific applications.…”

Section: Introductionmentioning

confidence: 99%

“…Digital MEMS phase shifters are generally categorized into four basic types: reflected type, 17 switched line, 18 loaded line, 19 and distributed MEMS transmission line (DMTL). [20][21][22][23][24][25][26][27][28][29][30][31][32] Many studies have focused on DMTL phase shifters because of their simple modeling, very wideband performance, and high-frequency operation. The DMTL analog phase shifter is introduced by Barker and Rebeiz.…”

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A low‐loss compact six‐bit DMTL phase shifter for phased array antenna applications

Teymoori

Dousti

Afrang

2020

Circuit Theory & Apps

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A phase shifter is one of the main components of radars and phased array systems. In this paper, a novel three-state two-bridge unit cell is presented for a compact low-loss six-bit distributed microelectromechanical systems (MEMS) transmission line (DMTL) phase shifter. The proposed unit cell includes a coplanar waveguide (CPW) transmission line, a MEMS bridge on the signal line, two metal-air-metal (MAM) capacitors on a glass substrate, and two additional electrodes under the MEMS bridge, near the signal line. Using these electrodes, it is possible to generate two different phase states employing the MEMS bridge, and the third state is produced by a metal-air-metal (MAM) bridge. Hence, the designed structure can generate three different phase shifts per unit cell (i.e., 5.625 , 11.25 , and 22.5 phase shifts). The novelty of this design is that the number of unit cells is considerably reduced from 64 in a conventional six-bit phase shifter to only 17 in our design. Therefore, the total length of the six-bit phase shifter and average loss are considerably reduced. The designed structure is calculated and simulated at 32 GHz using MATLAB and ANSOFT HFSS, respectively. According to the calculation and simulation results, the lateral size of the phase shifter is only 8.5 mm, the root mean square (RMS) phase error is 1.38 , and the average loss is 1.1 dB. The feasibility of the proposed design is investigated using the proposed fabrication process. The designed phase shifter can be easily scaled to other frequencies for radar and satellite applications with more bits. K E Y W O R D S DMTL phase shifter, phased array antennas, return loss, unit cell 1 | INTRODUCTION Radio frequency (RF) microelectromechanical systems (MEMS) as a new interesting area in MEMS technology enable us to design and use high-performance devices and systems for broadband communication applications. 1-3 In recent years, nano-electromechanical systems (NEMS) have also developed and have found some new applications. 4-10 RF MEMS-based devices include switches, inductors, capacitors, varactors, and phase shifters. Phase shifters are the main components of the phased array antennas for radar applications and are classified into analog and digital types. 11-14 Analog MEMS phase shifters change the phase from 0 to 360 continuously, and their structure contains MEMS varactors. 15 Digital MEMS phase shifters contain only a discrete set of phase shifts and usually employ MEMS

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“…The model of this phase shifter is the same as that of the analog phase shifter, except a discrete or static capacitor placed in series with MEMS switch. Many researchers have developed digital TTD phase shifters in different ways and are reported in Hayden and Rebeiz (2000), Hayden et al (2001), Kim et al (2002), Hayden and Rebeiz (2003), Hung et al (2004), Topalli et al (2006), Lakshminarayanan and Weller (2006), Du et al (2010a, 2010b), Dey and Koul (2014, 2015). The metal–insulator–metal (MIM) and metal–air–metal (MAM) capacitors are the widely used static capacitance in literature.…”

Section: Introductionmentioning

confidence: 99%

Design and experimental analysis of MEMS-based Ku band phase shifter

Rajan

Punitha²

2018

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Purpose This paper aims to design a radio frequency micro-electro-mechanical system (RF MEMS)-based phase shifter using chamfered coplanar waveguide (CPW) transmission line (t-line) with open-circuit interdigital metal–air–metal (ID MAM) capacitors. Design/methodology/approach The proposed phase shifter achieves maximum differential phase shift with low loss at Ku band. The phase shifter is built with one switchable fixed-fixed beam (MEMS switch) on chamfered CPW t-line in series with two planar open-circuit ID MAM capacitors. An equivalent circuit model for the proposed phase shifter is derived, and its parameters are extracted using an electromagnetic (EM) solver. Findings The MEMS switch is actuated using an electrostatic method with the calculated residual stress of 44.26 MPa. The fabricated phase shifter exhibits low insertion loss, close to 0.14 dB at 17 GHz, with the maximum phase shift of 15.06°. The return loss is greater than 23 dB between 12 and 18 GHz. Originality/value This phase shifter presents a promising solution for low loss applications in the Ku band with a maximum phase shift. As the maximum phase shift of 15.06° is achieved for a unit cell with low insertion loss, the phase shifter is found to be feasible for modern electronically tunable phased arrays used for satellite communication and radar systems.

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10–25 GHz frequency reconfigurable MEMS 5-bit phase shifter using push–pull actuator based toggle mechanism

Cited by 13 publications

References 27 publications

17-30 GHZ Reliable and Compact Analog Phase Shifter Using Lateral Micromachined Sp7t Switches, and DMTL Arrays

17-30 GHZ Reliable and Compact Analog Phase Shifter Using Lateral Micromachined Sp7t Switches, and DMTL Arrays

A low‐loss compact six‐bit DMTL phase shifter for phased array antenna applications

Design and experimental analysis of MEMS-based Ku band phase shifter

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