100 picoliter droplet handling using 256 (2&lt;sup&gt;8&lt;/sup&gt;) microvalve array with 18 multiplexed control lines

Kawai, Kentaro; Shibata, Yoko; Shoji, Shuichi

doi:10.1109/sensor.2009.5285698

Cited by 3 publications

(9 citation statements)

References 5 publications

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“…This latter property is extensively shown in more recent publications where these actuators are integrated in massive arrays for fluid control [10] and mixing [23] or fluidic devices with tunable channel topographies [24]. For instance, systems counting up to 256 valves [8] and fluidic memory devices counting 3574 valves [25] have been developed. Moraes et al developed Braille displays with large arrays of PDMS membrane actuators (figure 1(2) [26]).…”

Section: Membrane Actuatorsmentioning

confidence: 82%

“…They consist of a flat or corrugated membrane that is deflected by the driving pressure. This deflection is often used to grasp objects [6,7] or as active element in micropumps, valves or mixers (figure 1(1)) [1,[8][9][10]. Alternatively, they are often applied in lab-on-achip devices for sorting and trapping cells [11][12][13][14][15].…”

Section: Membrane Actuatorsmentioning

confidence: 99%

“…A simplified two-dimensional bellows is described in [72]. These bellows are fabricated by RIE in a silicon (Si) wafer, resulting in the structure shown in figure 1 (8). Afterwards, two pyrex glass plates are anodically bonded to the bellows.…”

Section: Bellows Actuatorsmentioning

confidence: 99%

“…(7) Reprinted with permission from [71], (© 1997 IEEE). (8) Reprinted from [72], copyright (2002), with permission from Elsevier. (9) Reprinted from [73], copyright (2006), with permission from Elsevier.…”

Section: Introductionmentioning

confidence: 99%

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Pneumatic and hydraulic microactuators: a review

Volder

Reynaerts

2010

J. Micromech. Microeng.

253

161

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The development of MEMS actuators is rapidly evolving and continuously new progress in terms of efficiency, power and force output is reported. Pneumatic and hydraulic are an interesting class of microactuators that are easily overlooked. Despite the 20 years of research, and hundreds of publications on this topic, these actuators are only popular in microfluidic systems. In other MEMS applications, pneumatic and hydraulic actuators are rare in comparison with electrostatic, thermal or piezo-electric actuators. However, several studies have shown that hydraulic and pneumatic actuators deliver among the highest force and power densities at microscale. It is believed that this asset is particularly important in modern industrial and medical microsystems, and therefore, pneumatic and hydraulic actuators could start playing an increasingly important role. This paper shows an in-depth overview of the developments in this field ranging from the classic inflatable membrane actuators to more complex piston-cylinder and drag-based microdevices.

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Section: Membrane Actuatorsmentioning

confidence: 82%

Section: Membrane Actuatorsmentioning

confidence: 99%

Section: Bellows Actuatorsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Pneumatic and hydraulic microactuators: a review

Volder

Reynaerts

2010

J. Micromech. Microeng.

253

161

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“…Active micro mixers use external energy input as well as fluid pumping energy to introduce time-dependent perturbations that stir and perturb the fluid for accelerating the mixing process [15] The type of external force employed by active micro mixers can be further categorized as pressure field-driven [16], acoustic (ultrasonic)-driven [17], temperature-induced [18], electric field [19,20], dielectrophoresis, electrocoalescence [21][22][23], or magneto-hydrodynamic [24]. Generally, active micro mixers have higher mixer efficiency [25].…”

Section: Introductionmentioning

confidence: 99%

Controllable Active Micro Droplets Merging Device Using Horizontal Pneumatic Micro Valves

et al. 2013

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Abstract:We present an active droplet merging device, which can merge various sizes of micro droplets in different numbers by using pneumatically controlled horizontal PDMS microvalves. The merging part consists of a main and side channels separated by a pillar array. The pillar array structure is contained within a microfuidic channel. The function of the pillar array provides a bypass path to the continuous flow (oil) inside the merging chamber. Droplets are successfully generated within the channel and achieve merging by controlling the selective different numbers and diameters of droplets through varying the flow resistance of main and side channel. In the merging chamber, a droplet will enter and slow down its movement. It will wait and then merge with the sequential droplets. These experiments demonstrate that such a merging device can controllably select and adjust the distance between the different adjacent micro droplets without any generation of sister droplets in the side channel. The device has no desynchronization problems. Thus, it can be applied for efficiently mixing the droplets in various diameters and numbers without changing the structure of the merging chamber. Hence, this device can be a more effective choice when applying microfluidics to chemical and biological applications.

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Microfluidic valve array control system integrating a fluid demultiplexer circuit

Kawai

Arima

Morita

et al. 2015

J. Micromech. Microeng.

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This paper proposes an efficient control method for the large-scale integration of microvalves in microfluidic systems. The proposed method can control 2n individual microvalves with 2n + 2 control lines (where n is an integer). The on-chip valves are closed by applying pressure to a control line, similar to conventional pneumatic microvalves. Another control line closes gate valves between the control line to the on-chip valves and the on-chip valves themselves, to preserve the state of the on-chip valves. The remaining control lines select an activated gate valve. While the addressed gate valve is selected by the other control lines, the corresponding on-chip valve is actuated by applying input pressure to the control line to the on-chip valves. Using this method would substantially reduce the number of world-to-chip connectors and off-chip valve controllers. Experiments conducted using a fabricated 28 microvalve array device, comprising 256 individual on-chip valves controlled with 18 (2 × 8 + 2) control lines, yielded switching speeds for the selected on-chip valve under 90 ms.

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100 picoliter droplet handling using 256 (2<sup>8</sup>) microvalve array with 18 multiplexed control lines

Cited by 3 publications

References 5 publications

Pneumatic and hydraulic microactuators: a review

Pneumatic and hydraulic microactuators: a review

Controllable Active Micro Droplets Merging Device Using Horizontal Pneumatic Micro Valves

Microfluidic valve array control system integrating a fluid demultiplexer circuit

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