111 Velocity Distribution of Ions Incident on a Wafer in Two-Frequency Capacitively-Coupled Plasma

Wakayama, Go; Nanbu, Kenichi

doi:10.1299/jsmefed.2001.15

The Proceedings of the Fluids Engineering Conference

2001

DOI: 10.1299/jsmefed.2001.15

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111 Velocity Distribution of Ions Incident on a Wafer in Two-Frequency Capacitively-Coupled Plasma

Go Wakayama

Kenichi Nanbu

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111 Velocity Distribution of Ions Incident on a Wafer in Two-Frequency Capacitively-Coupled Plasma

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