12‐4: Inorganic Halide Perovskite Thin Films Realized by Pulsed Laser Deposition over Large Area for MicroLEDs Color Conversion Layers

Abstract

This paper reports the deposition of inorganic halide perovskite thin films, using pulsed laser deposition, as a way to fabricate green and red color conversion layers for microLEDs. The photoluminescence of the thin film reveal pure colors and uniform emission on 200 mm wafers. The unencapsulated thin films are stable under ambient air.