The sensitivities to y rays were investigated for photo acid generators : N sulfonyloxy phthalimide 2, 1V sulfonyloxy succinimide 3, 1V sulfonyloxy l,8-naphthalimide 4, N tosyloxy 5-norbomene-2,3-dicarboximide 5, triphenylsulfonium trifluoromethanesulfonate 6, diphenyliodonium chloride 7 and chloroform 8. The acid generation efficiency was monitored by the use of acid sensitive dye, fluoran dye la. The efficiency for y irradiation decreased in the order 7 > 2 > 6 > 5 > 3 > 4. In the case of 8, decomposition of la was accompanied. 7 and 8 were of no practical use because volatile hydrogen chloride was generated. The others (2-6) generate methanesulfonic acid, p-toluenesulfonic acid or trifluoromethanesulfonic acid which are not so volatile acid as hydrogen chloride. 1V sulfonyloxy imide compounds (2-5) have an advantage for practical use as dosimeter because these reagents dissolve in either polar or nonpolar solvent.