157-nm coherent light source as an inspection tool for F_2 laser lithography

Abstract

We have developed a 157-nm coherent light source by two-photon resonant four-wave mixing in Xe, with two tunable single-mode 1-kHz Ti:sapphire laser systems at 768 and 681 nm. This light source has been developed to determine the instrumental function of a vacuum ultraviolet spectrometer and to evaluate optical designs for ultra-line-narrowed F(2) laser lithography. The spectral linewidth of the source was less than 0.008 pm (FWHM), with an average power of 0.6 mW.

Development of high coherence, 200mW, 193nm solid-state laser at 6 kHz

“…High-power, high repetition rate Ti:sapphire lasers have been developed in the central gain region around 800 nm [8,9,10]. However the Ti:sapphire laser with an output above 10 W, a repetition rate of 6 kHz, and single mode at the edge wavelength have not yet been developed, to our knowledge.…”

Micro-pulling down method-grown Er3+:LiCaAlF6 as prospective vacuum ultraviolet laser material

“…Meanwhile, vacuum ultraviolet (VUV) light sources have extensive applications in various fields such as photolithography [6] and spectroscopy [7]. Sources of VUV radiation are currently limited to excimer lasers [8] and nonlinear methods using frequency mixing in gases [9,10] metal vapors [11], and nonlinear crystals [12].…”

High-power tunable narrow-linewidth Ti:sapphire laser at repetition rate of 1 kHz

“…Togashi et al reported an all-solidstate tunable Ti:sapphire laser system, which consists of an oscillator and three-stage amplifier, to produce a laser with power of 32 W and linewidth of 0.7 GHz at a repetition rate of 5 kHz, and its frequency conversion to vacuum UV radiation in 2001 [8]. A single-mode Ti:sapphire oscillator-amplifier system pumped by three external synchronized sources was developed by Suganuma et al, in which generation of a coherent light source at 157 nm is obtained, the linewidth of the output laser is compressed to 28.3 MHz by a dispersive component in the oscillator, and the output power is 8.5 W by following a four-pass amplifier [9]. In 2007, Hannemann et al reported a narrow-bandwidth injection-seeded self-synchronized Ti:sapphire oscillatoramplifier system at 10 Hz, in which the maximum energy of pulses is 41 mJ with a linewidth of 45.5 MHz and a tunable wavelength range of 764 to 856 nm [10].…”