“…Micromirror devices, depending on their structure, actuation mechanism, and capabilities, are used in many applications such as optical networks (switching) [1,2], endoscopic optical coherence tomography measurements [3][4][5][6][7][8], and beam positioning [9]. To develop these micromirror devices, stand-alone bulk micromachining, surface micromachining or combination of these processes has been used.…”