16-term error model and calibration procedure for on-wafer network analysis measurements

Butler, J.V.; Rytting, Doug; Iskander, M.F.; Pollard, R.D.; Bossche, Marc Vanden

doi:10.1109/22.106567

Cited by 98 publications

(40 citation statements)

References 4 publications

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“…The proposed measurement protocol is simple to implement and can directly benefit the above developments. For example, the utility of the technique could be further explored in future studies through measurements of substratemounted antenna impedances and radiation loss, after allowing for additional measurements for the full characterization of the non-reciprocal 2-ports where S 12 = S 21 or in on-wafer network analysis [37] or N-port [27] measurements.…”

Section: Discussionmentioning

confidence: 99%

One-Port De-Embedding Technique for the Quasi-Optical Characterization of Integrated Components

2013

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We describe a one-port de-embedding technique suitable for the quasi-optical characterization of terahertz integrated components at frequencies beyond the operational range of most vector network analyzers. This technique is also suitable when the manufacturing of precision terminations to sufficiently fine tolerances for the application of a TRL de-embedding technique is not possible. The technique is based on vector reflection measurements of a series of easily realizable test pieces. A theoretical analysis is presented for the precision of the technique when implemented using a quasi-optical null-balanced bridge reflectometer. The analysis takes into account quantization effects in the linear and angular encoders associated with the balancing procedure, as well as source power and detector noise equivalent power. The precision in measuring waveguide characteristic impedance and attenuation using this de-embedding technique is further analyzed after taking into account changes in the power coupled due to axial, rotational, and lateral alignment errors between the device under test and the instruments' test port. The analysis is based on the propagation of errors after assuming imperfect coupling of two fundamental Gaussian beams. The required precision in repositioning the samples at the instruments' test-port is discussed. Quasi-optical measurements using the de-embedding process for a WR-8 adjustable precision short at 125 GHz are presented. The de-embedding methodology may be extended to allow the determination of S-parameters of arbitrary two-port junctions. The measurement technique proposed should prove most useful above 325 GHz where there is a lack of measurement standards.

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Section: Discussionmentioning

confidence: 99%

One-Port De-Embedding Technique for the Quasi-Optical Characterization of Integrated Components

2013

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“…All measurement results published to date demonstrate the cross-talk removing capabilities of the 15-term model in the presence of large cross-talk errors (using a 20dB attenuator as the artificial leakage path) [1], [2], [3], [7]. In this case, the cross-talk describing error-terms are themselves large enough, such that the error-terms may be computed using the simple matrix inversion scheme of eq.…”

Section: Introductionmentioning

confidence: 95%

Error-Term Computation for the 15-Term Error-Model preserving Measurement Dynamic

Gronefeld

Schiek

1998

28th European Microwave Conference, 1998

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Calibration of vector network analyzers (VNAs) according to the cross-talk including 15-term errormodel suffers from a significant reduction in measurement dynamic, if no cross-talk is present. This problem that, to the authors knowledge, has never been addressed before m literature severely restricts the usability of the error-modeL especially for on-wafer measurements. It will be shown that the problem is not a numerical one, but rather lies in the propagation of measurement errors during the computation of the error-terms. A novel algorithm, better adapted to the problem at hand, is presented, and suggestions towards an optimum set of calibration standards are given. Finally, waferprober measurements that show a significant cross-talk reduction and accuracy gain over 7-term corrections are presented for the first time.

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“…The system error calibration moves reference plane to the probe tips, and the on-chip deembedding further moves reference plane to transistor terminals. The most complete system error model is the 16 term error model [1], which accounts for all of the possible signal paths between the 4 waves measured inside the vector network analyzer (VNA) and the 4 waves at the two ports of the device under test (DUT), as illustrated in Fig. 1(a).…”

Section: Introductionmentioning

confidence: 99%

Singular-Value-Decomposition Based Four Port De-embedding and Single-step Error Calibration for On-chip Measurement

Wei

Niu

Sweeney

et al. 2007

2007 IEEE/MTT-S International Microwave Symposium

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We present the 4-port based two-step on-chip parasitics de-embedding and single-step error calibration results for on-chip transistor measurements on a 0.13 ,m RF CMOS process. SVD is used for solving the unknown 4-port transmission parameters and quantifying the measurement errors in the single-step approach. Despite the less accurate onchip standards compared to standards on an impedance standard substrate, single-step error calibration gives reasonable Y-parameters for the examined transistor.

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16-term error model and calibration procedure for on-wafer network analysis measurements

Cited by 98 publications

References 4 publications

One-Port De-Embedding Technique for the Quasi-Optical Characterization of Integrated Components

One-Port De-Embedding Technique for the Quasi-Optical Characterization of Integrated Components

Error-Term Computation for the 15-Term Error-Model preserving Measurement Dynamic

Singular-Value-Decomposition Based Four Port De-embedding and Single-step Error Calibration for On-chip Measurement

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