2 μm波段片上光子集成器件的研究进展（特邀）

Xi, 王希 Wang; Yingjie, 刘英杰 Liu; Zimeng, 张子萌 Zhang; Jianing, 王嘉宁 Wang; Yong, 姚勇 Yao; Qinghai, 宋清海 Song; Ke, 徐科 Xu

doi:10.3788/irla20220087

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Cited by 4 publications

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“…Using the FDTD method, a fluorescence excitation chip working at 638nm was designed and fabricated. The chip consists of an input grating coupler, multimode interferences(MMIs), and excitation grating couplers [9] . An array of 2016 excitation spots is constructed by cascading multiple MMIs and excitation gratings.…”

Section: Introductionmentioning

confidence: 99%

Ultra-high integrated silicon nitride fluorescence excitation chip for point-to-point excitation of biofluorescence signals

yan,

Shi,

Wang

et al. 2023

AOPC 2023: Optical Sensing, Imaging, and Display Technology and Applications; And Biomedical Optics

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Section: Introductionmentioning

confidence: 99%

Ultra-high integrated silicon nitride fluorescence excitation chip for point-to-point excitation of biofluorescence signals

yan,

Shi,

Wang

et al. 2023

AOPC 2023: Optical Sensing, Imaging, and Display Technology and Applications; And Biomedical Optics

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Subwavelength structure engineered grating coupler for the 2-μm waveband

Sun

Xia

et al. 2022

Frontiers in Optics + Laser Science 2022 (FIO, LS)

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High-efficient subwavelength structure engineered grating couplers for 2-µm waveband high-speed data transmission

Hu,

He,

Sun

et al. 2023

Opt. Express

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The 2-µm waveband is becoming an emerging window for next-generation high-speed optical communication. To enable on-chip high-speed data transmission, improving the signal-to-noise ratio (SNR) by suppressing the coupling loss of a silicon chip is critical. Here, we report grating couplers for TE and TM polarized light at the 2-µm waveband. With a single-step fully etched process on the 340 nm silicon-on-insulator (SOI) platform, the devices experimentally demonstrate high coupling efficiency of -4.0 dB and 1-dB bandwidth of 70 nm for the TE polarized light, while -4.5 dB coupling efficiency and 58 nm 1-dB bandwidth for the TM polarized light. For comprehensive performance, both of them are among the best grating couplers operating in the 2-µm waveband so far. We also demonstrate 81Gbps high-speed on-chip data transmission using pulse amplitude modulation 8-level (PAM-8) signals.

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2 μm波段片上光子集成器件的研究进展（特邀）

Cited by 4 publications

References 0 publications

Ultra-high integrated silicon nitride fluorescence excitation chip for point-to-point excitation of biofluorescence signals

Ultra-high integrated silicon nitride fluorescence excitation chip for point-to-point excitation of biofluorescence signals

Subwavelength structure engineered grating coupler for the 2-μm waveband

High-efficient subwavelength structure engineered grating couplers for 2-µm waveband high-speed data transmission

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