Abstract-In this work we investigate the effect of the laser-firing process on the back surface passivation of p-type silicon heterojunction solar cells. For that purpose, two different nanosecond laser sources radiating at ultraviolet (355 nm) and visible (532 nm) wavelengths are employed. Firstly, we optimize the laser-firing process in terms of the electrical resistance of locally diffused point contacts. Specific contact resistance values as low as 0.91 mΩ⋅cm 2 and 0.57 mΩ⋅cm 2 are achieved for the visible and ultraviolet laser sources, respectively. In addition, the impact of the laser-firing process on the rear surface passivation is studied by analyzing the internal-quantum-efficiency curves of complete devices. Low surface recombination velocities in the range of 300 cm/s are obtained for the ultraviolet laser with a 1% fraction of contacted area. This value increases to about 700 cm/s for the visible laser, which indicates a significantly higher recombination at the contacted area. The best heterojunction solar cells with rear laser-fired contacts are obtained for the ultraviolet laser and reached a 17.5% conversion efficiency.