2016
DOI: 10.1016/j.solmat.2016.05.054
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21.0%-efficient screen-printed n-PERT back-junction silicon solar cell with plasma-deposited boron diffusion source

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Cited by 17 publications
(7 citation statements)
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“…Screen-printing is a traditional and versatile printing method [1,2]. It is well established, not only in textile or poster printing, but also in the fabrication of all kinds of electronic devices, such as printed circuit boards [3,4], thin film transistors [5], displays, touch panels [6], low temperature co-fired ceramic devices [7,8], and photovoltaic cells [9,10]. Screen-printing is easy to implement and allows for high through-put, and is thus economically attractive for high-volume products like silicon (Si) solar cells.…”
Section: Introductionmentioning
confidence: 99%
“…Screen-printing is a traditional and versatile printing method [1,2]. It is well established, not only in textile or poster printing, but also in the fabrication of all kinds of electronic devices, such as printed circuit boards [3,4], thin film transistors [5], displays, touch panels [6], low temperature co-fired ceramic devices [7,8], and photovoltaic cells [9,10]. Screen-printing is easy to implement and allows for high through-put, and is thus economically attractive for high-volume products like silicon (Si) solar cells.…”
Section: Introductionmentioning
confidence: 99%
“…We measure the quasi steady state photoconductance (QSSPC) of these samples using an intrinsic carrier concentration of Si of n i = 8.6 × 10 9 cm −3 . We achieve J 0 values of 40 fA cm −2 at boron sheet resistances R sheet between 90 and 108 Ω/sq applying the BSG/SiN z stacks as diffusion source and surface passivation . This compares to BBr 3 ‐diffused test wafers with AlO x /SiN y surface passivation exhibiting J 0 values of 14 fA cm −2 at boron sheet resistances R sheet 102 Ω/sq.…”
Section: Bicore Solar Cells With Bsg/sinzmentioning
confidence: 88%
“…Further details on the PECVD deposition parameters of the BSG/SiN z stack as well as on the POCl 3 co‐diffusion are published in Ref. . Finally, the test wafers are fired in a belt furnace with typical contact firing parameters.…”
Section: Bicore Solar Cells With Bsg/sinzmentioning
confidence: 99%
“…Typically, for silicon homojunction solar cells, the doping process to form a doped region in c-Si is based on thermal diffusion of dopant atoms from a dopant source, such as borosilicate-glass (BSG) or phosphosilicate-glass (PSG). To avoid unwanted metal impurity contamination during thermal diffusion and the subsequent process steps, pre- and postcleaning processes are needed. For silicon heterojunction (SHJ) solar cells, n-type or p-type amorphous silicon (n,p-a-Si:H) is stacked on intrinsic a-Si:H (i-a-Si:H).…”
Section: Introductionmentioning
confidence: 99%