Thin films with magnesium oxide (MgO) and silicon oxide (SiO 2 ) compounds mixed at various mixture ratios were deposited on flexible polyether sulfone (PES) substrates by an e-beam evaporator to investigate their potential for transparent barrier applications. In this study, as the MgO fraction increased, thin films comprising MgO and SiO 2 compounds became more amorphous, and their surface morphologies became smoother and denser. In addition, zirconium oxide (ZrO 2 ) was added to the above-mentioned compound mixtures, and the properties of the compound mixture comprising Mg-Si-Zr-O were then measured.