2311 Development of X-ray mask that uses carbon substrate as membrane

Sawa, Yoshitaka; Katori, Megumi; Yamasita, Kenji; Noda, Daiji; Hattori, Tadashi

doi:10.1299/jsmemdt.2008.8.239

The Proceedings of the Machine Design and Tribology Division Meeting in JSME

2008

DOI: 10.1299/jsmemdt.2008.8.239

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2311 Development of X-ray mask that uses carbon substrate as membrane

Yoshitaka Sawa¹,

Megumi Katori²,

Kenji Yamasita

et al.

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2311 Development of X-ray mask that uses carbon substrate as membrane

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