2023
DOI: 10.1109/jeds.2023.3234235
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24.4 W/mm X-Band GaN HEMTs on AlN Substrates With the LPCVD-Grown High-Breakdown-Field SiN x Layer

Abstract: This paper reports on an AlGaN/GaN high-electron-mobility transistor (HEMT) on freestanding AlN substrates with a record-high output power density of 24.4 W/mm at the X-band. A high-drain current operation of 1.4 A/mm was realized by employing high-density 2-dimensional electron gas channel and regrown Ohmic contacts. Furthermore, a high-voltage operation of 110 V was achieved owing to the high-density and high-breakdown SiN x layer grown by low-pressure/high-temperature chemical vapor deposition. Three-stage … Show more

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Cited by 8 publications
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