25 Gbyte Read-Only Memory Disk by Injection-Compression Molding Process

Imai, Tetsuya; Shida, Noriyoshi; Higuchi, Takanobu; Suga, Keiji; Iida, Takuya; Yokogawa, Fumihiko

doi:10.1143/jjap.40.1661

Cited by 14 publications

(7 citation statements)

References 2 publications

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“…To this end, shorter wavelengths 1- 3) or electron beams [4][5][6] have been investigated in several laboratories. When the wavelength is shortened, however, we face the difficulty of developing appropriate light sources as well as optical elements; moreover, electron beam techniques require vacuum chambers with high voltage units to handle the beam, resulting in a need for large-scale equipment.…”

mentioning

confidence: 99%

Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam

Kuwahara¹,

Mihalcea³

et al. 2002

Jpn. J. Appl. Phys.

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A lithography technique called "thermal lithography" was proposed for fabricating nanometer-sized structures far beyond the optical diffraction limit. A focused laser spot was utilized to generate a spatially confined hot area in a photoresist film. We succeeded in fabricating lines and dots of 100-nm dimensions by this technique. This dimension of the patterns was approximately one fifth of the theoretical diffraction limit of our optical system. The technique will be applied to the mastering process of optical disks as a low-cost lithography technique because of the cheap semiconductor laser chip.

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confidence: 99%

Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam

Kuwahara¹,

Mihalcea³

et al. 2002

Jpn. J. Appl. Phys.

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“…Among the various hot-embossing processes, injection-compression molding (ICM) is one of the lowest cost and highest throughput techniques [ 5 , 6 , 7 ]. Nagato [ 8 ] demonstrated the fabrication of replica molds for UV-NIL by ICM, which is a proven technique for molding optical disks, such as compact disks (CDs), digital versatile disks (DVDs), and Blu-ray disks (BDs) with low cost and high throughput [ 9 , 10 ]. However, this process has several disadvantages, such as warpage, material shrinkage, and unevenness.…”

Section: Introductionmentioning

confidence: 99%

Study of a Compression-Molding Process for Ultraviolet Light-Emitting Diode Exposure Systems via Finite-Element Analysis

Hwang

Lee

2017

Sensors

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Although wafer-level camera lenses are a very promising technology, problems such as warpage with time and non-uniform thickness of products still exist. In this study, finite element simulation was performed to simulate the compression molding process for acquiring the pressure distribution on the product on completion of the process and predicting the deformation with respect to the pressure distribution. Results show that the single-gate compression molding process significantly increases the pressure at the center of the product, whereas the multi-gate compressing molding process can effectively distribute the pressure. This study evaluated the non-uniform thickness of product and changes in the process parameters through computer simulations, which could help to improve the compression molding process.

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“…In this paper, I propose and demonstrate the fabrication of replica molds for UV-NIL by injection compression molding (ICM), which is a proven technique for molding optical disks such as compact disks (CDs), digital versatile disks (DVDs), and Blu-ray disks (BDs) with low cost and high throughput [7][8][9]. ICM is one of the lowest cost and highest throughput processes among hot-embossing processes [10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Injection Compression Molding of Replica Molds for Nanoimprint Lithography

Nagato

2014

Polymers

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As a breakthrough in the cost and durability of molds for nanoimprint lithography (NIL), replica molds are fabricated by injection compression molding (ICM). ICM is commonly used for optical disks such as DVDs or Blu-ray disks and is also a practical fabrication method for nanostructures. In this paper, I successfully demonstrated the fabrication of cycloolefin polymer replica molds with structures smaller than 60 nm by ICM. Furthermore, ultraviolet (UV)-NIL using these replica molds was demonstrated. UV-cured resist was replicated over an area of 60 mm diameter. The degree of replication by UV-NIL in the first usage of each replica mold had good repeatability. Because ICM is a high-throughput, low-cost process, the replica mold can be disposed of after a certain time for UV-NIL. This method leads to a high-integrity UV-NIL process of patterned media because multiple large-area replica molds can be fabricated simultaneously.

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25 Gbyte Read-Only Memory Disk by Injection-Compression Molding Process

Cited by 14 publications

References 2 publications

Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam

Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam

Study of a Compression-Molding Process for Ultraviolet Light-Emitting Diode Exposure Systems via Finite-Element Analysis

Injection Compression Molding of Replica Molds for Nanoimprint Lithography

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