Robomech
 2005
DOI: 10.1299/jsmermd.2005.152_4
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2A1-N-089 Flexible thin film supported by arrayed multi microactuators toward adaptive surface profile(MEMS and Nano-technology 1,Mega-Integration in Robotics and Mechatronics to Assist Our Daily Lives)

Tomohiko Saika
1
,
Hiroshi Kanekiyo
2
,
Satoshi Konishi
3
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