2018
DOI: 10.1002/admi.201800812
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2D MoSe2 Transistor with Polymer‐Brush/Channel Interface

Abstract: depletion mode in general, that is to say, threshold voltage (V th ) is located quite away from 0 V whether the channel is nor p-type. [1,11,13,18,[22][23][24] This means that practical switching is not easy without applying high voltages; distinct OFF state is sometimes desperate in any smart functional/electrical applications involving either driving or sensing. [13,22,25,26] Second, gate bias induced hysteresis of 2D TMD transistor is, in fact, quite a critical issue for realizing prototype sensor applicati… Show more

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Cited by 30 publications
(33 citation statements)
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“…The PS-brush solution (10 mg/mL) was spin-coated onto the Al 2 O 3 surface and then heated at 170°C for 48 h inside a vacuum oven, so that the ultrathin PS layer may be covalently bonded to the plasma-treated Al 2 O 3 surface. 49,50 As stated in the above transfer process, as-grown monolayer was transferred from SiO 2 /p + -Si substrate to patterned bottom gate substrate using PS transfer method (Supporting Information, Figure S4). 48 After transfer, CVD MoS 2 flakes were patterned by photolithography and O 2 plasma dry etching process.…”
Section: Device Fabricationmentioning
confidence: 99%
“…The PS-brush solution (10 mg/mL) was spin-coated onto the Al 2 O 3 surface and then heated at 170°C for 48 h inside a vacuum oven, so that the ultrathin PS layer may be covalently bonded to the plasma-treated Al 2 O 3 surface. 49,50 As stated in the above transfer process, as-grown monolayer was transferred from SiO 2 /p + -Si substrate to patterned bottom gate substrate using PS transfer method (Supporting Information, Figure S4). 48 After transfer, CVD MoS 2 flakes were patterned by photolithography and O 2 plasma dry etching process.…”
Section: Device Fabricationmentioning
confidence: 99%
“…The detail procedure of PS‐brush has been already reported elsewhere as also seen in Figure S3 (Supporting Information). [ 44 ] However, it should be noted that annealing process for PS‐brush at 170 °C was done for quite a short duration of 6 h in this study (in general, it is used to be taking more than 48 h). For the semiconducting channel, p‐type MoTe 2 nanosheet (HQ graphene) was exfoliated and transferred onto the PS‐brush/50 nm thick Al 2 O 3 dielectric using polydimethylsiloxane (PDMS), [ 52 ] followed by source/drain electrode (25/25 nm Ti/Au) patterning for the channel of 5 °C length (using conventional UV photolithography).…”
Section: Methodsmentioning
confidence: 99%
“…Besides, our BST surface appears very hydrophilic as analyzed by de‐ionized (DI) water contact angle measurement (≈20°). Hydrophilic dielectric surface would cause high density traps at the channel/dielectric interface . We thus applied an ultrathin PMMA‐brush layer on BST by spin coating, to improve the surface quality.…”
Section: Resultsmentioning
confidence: 99%
“…Hydrophilic dielectric surface would cause high density traps at the channel/dielectric interface. [18,44] We thus applied an ultrathin PMMA-brush layer on BST by spin coating, to improve the surface quality. As a result, it was observed in Figure 1c that the BST surface becomes much smoother (RMS roughness ≈1.97 nm) and more hydrophobic (DI water contact angle ≈60°).…”
Section: Introductionmentioning
confidence: 99%