2016 14th IEEE International New Circuits and Systems Conference (NEWCAS) 2016
DOI: 10.1109/newcas.2016.7604787
|View full text |Cite
|
Sign up to set email alerts
|

3-axis high Q MEMS accelerometer with simultaneous damping control

Abstract: The increasing demand of consumer market sensors involves a continuous development for the die size, cost and performances. In this context, the integration of both a 3-axis MEMS accelerometer and a gyroscope within the same low pressure cavity becomes attractive. Such a packaging results in MEMS with high quality factor Q, which reduces Brownian noise, thereby improving the achievable precision. However, contrary to gyroscopes, in such a configuration, the MEMS accelerometers need to be damped prior to measur… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2017
2017
2023
2023

Publication Types

Select...
2
1
1

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(2 citation statements)
references
References 5 publications
0
2
0
Order By: Relevance
“…According to the mechanism verified so far, various measures can be adopted to suppress the nonlinearity of the accelerometer. For example, it is optional to reduce the Q-factor of accelerometers to a proper value such as 0.707 [ 26 , 27 , 28 , 29 , 30 ] to prevent nonlinearity deterioration stimulated at resonance. We chose to enlarge the drive electrode width by a few times, and simultaneously lower the Q-factor by one order of magnitude.…”
Section: Experiments and Resultsmentioning
confidence: 99%
“…According to the mechanism verified so far, various measures can be adopted to suppress the nonlinearity of the accelerometer. For example, it is optional to reduce the Q-factor of accelerometers to a proper value such as 0.707 [ 26 , 27 , 28 , 29 , 30 ] to prevent nonlinearity deterioration stimulated at resonance. We chose to enlarge the drive electrode width by a few times, and simultaneously lower the Q-factor by one order of magnitude.…”
Section: Experiments and Resultsmentioning
confidence: 99%
“…In the practical application of micromachined silicon resonant accelerometers, the mechanical environment of the application scenario is complex and variable, often featuring shock loads with multiple frequency components. Moreover, micromachined silicon resonant accelerometers often need to be packaged in a highly vacuumed chamber to obtain a very high quality factor, which greatly prolongs their stabilization time after shock loads and makes the resonant modes of sensitive structures more easily excited, which affects the actual performance of the accelerometer [2][3][4].…”
Section: Introductionmentioning
confidence: 99%