3-D micromachined hemispherical shell resonators with integrated capacitive transducers

Sorenson, Logan; Gao, Xin; Ayazi, Farrokh

doi:10.1109/memsys.2012.6170120

Cited by 63 publications

(43 citation statements)

References 8 publications

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“…The operation of a Pyrex spherical shell as a vibratory gyroscope has been also reported [23]. Micro hemispherical resonators have been demonstrated using polysilicon [24], silicon dioxide [25], [26], polycrystalline diamond [27], and ULE [28]. In [24]- [26], a thin shell was created using a surface micromachining or thermal growth process after isotropic Si dry etching.…”

Section: -Dimensional Blow Torch-molding Ofmentioning

confidence: 99%

“…Micro hemispherical resonators have been demonstrated using polysilicon [24], silicon dioxide [25], [26], polycrystalline diamond [27], and ULE [28]. In [24]- [26], a thin shell was created using a surface micromachining or thermal growth process after isotropic Si dry etching. In [27], a polycrystalline diamond resonator is fabricated using surface micromachining technique after defining a mold on a Si wafer using a micro electro-discharging machining (EDM) process.…”

Section: -Dimensional Blow Torch-molding Ofmentioning

confidence: 99%

“…Scanning-electron microscope (SEM) images of a graphite mold, defined using precision micro-milling process[24]. The mold measures an outer radius of 1.5 mm, inner radius of 0.3 mm, and depth of 2 mm.…”

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confidence: 99%

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3-Dimensional Blow Torch-Molding of Fused Silica Microstructures

Cho

Yan

Gregory

et al. 2013

J. Microelectromech. Syst.

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This paper presents a new and simple microfabrication process for creating various 3-D microstructures with highaspect ratios (height/radius >1). The key feature of this process is the use of a blow torch, which provides very intense localized heat for a short amount of time (<10 s). The flame temperature can be up to 2500°C for a propane-oxygen torch, above the melting temperatures of many high-Q materials. We demonstrate the fabrication of hemispherical and half-toroid (birdbath) shells from 100-µm-thick fused silica substrates. The structures have an rms surface roughness of 5.3 Å, which is crucial for achieving both high mechanical and optical Q. We create microbirdbath resonators by batch-level releasing the birdbath shells. We verify the resonance mode shapes of the degenerate n = 2 wineglass modes using laser vibrometry and measure the frequency and Q of these modes using laser vibrometry and a capacitive measurement method. We demonstrate one of the best mechanical Q and smallest frequency split between the n = 2 wineglass modes among existing micromechanical resonators. The birdbath resonator is promising for emerging applications such as the microrate-integrating gyroscope.[2013-0166]

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Section: -Dimensional Blow Torch-molding Ofmentioning

confidence: 99%

Section: -Dimensional Blow Torch-molding Ofmentioning

confidence: 99%

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3-Dimensional Blow Torch-Molding of Fused Silica Microstructures

Cho

Yan

Gregory

et al. 2013

J. Microelectromech. Syst.

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“…These MEMS techniques include micro scale glass blow molding using quartz [12], Pyrex [13], and fused silica [14], as well as traditional silicon processing techniques followed by deposition of polysilicon [15], silicon nitride [16], alumina [17], or diamond [18] device layers. Most versatile in terms of shaping the resonator are the glass blowing techniques.…”

Section: Introductionmentioning

confidence: 99%

Metallic Glass Hemispherical Shell Resonators

Kanik

Bordeenithikasem

Kim

et al. 2015

J. Microelectromech. Syst.

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By utilizing bulk metallic glasses' (BMGs) unique combination of amorphous structure, material properties, and fabrication opportunities, ultrasmooth and symmetric 3-D metallic glass resonators that are complimentary metal oxide semiconductor (CMOS) post-processing compatible are fabricated. Surface roughness to size ratio fabrication precision in the order of 100 parts per billion is demonstrated with a 3-mm diameter Pt 57.5 Cu 14.7 Ni 5.3 P 22.5 BMG hemispherical shell with a thickness variation <100 nm and a surface roughness of <1 nm R a . The resonator exhibits a resonant frequency of 13.9440 kHz ± 0.1 Hz with 0.035% frequency mismatch between degenerate N = 2 wineglass modes with a quality factor of 6200. This performance was obtained in the asmolded state without any device tuning or trimming. Another resonator with N = 2 resonant modes at 9.393 and 9.401 kHz, and quality factors of 7800 and 6500 was mounted into an integrated electrode system. Electrical readout by capacitive sensing in both time and frequency domains showed a resonance shift to 9.461 and 9.483 kHz, respectively. The quality factor was reduced to 5400 and 5300, respectively. This investigation demonstrates that BMG resonators may serve as a basis for robust microelectromechanical systems resonator devices with increased performance and low-cost fabrication techniques that exploits the atomic structure, unique softening behavior, strength, formability, and toughness of metallic glasses.[2014-0187]

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“…In contrast, MEMS fabrication techniques allow batch production of inexpensive sensors. The community has investigated ring resonators as rate-integrating gyroscopes for over a decade [3], [4], and has recently demonstrated several methods to fabricate hemispherical shells [5], [6], [7]. However, microfabrication introduces geometric imperfections in many processing steps.…”

Section: Introductionmentioning

confidence: 99%

Effects of imperfections on solid-wave gyroscope dynamics

Yilmaz

Bindel

2013

2013 Ieee Sensors

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Abstract-Solid-wave gyroscopes are symmetric resonators that sense rotation by measuring how Coriolis forces perturb a degenerate mode pair. The idealized dynamics of these devices are described by ODE models of two identical oscillators coupled by a perturbation due to rotation. In miniaturized solid-wave gyroscopes, geometric distortions due to imperfect fabrication also perturb the dynamics, and this limits sensing accuracy. In this work, we describe how geometric imperfections affect the dynamics of solid-wave gyroscopes. We also use selection rules both to find qualitative information about what types of geometry perturbations most affect sensor performance and to accelerate computations.

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3-D micromachined hemispherical shell resonators with integrated capacitive transducers

Cited by 63 publications

References 8 publications

3-Dimensional Blow Torch-Molding of Fused Silica Microstructures

3-Dimensional Blow Torch-Molding of Fused Silica Microstructures

Metallic Glass Hemispherical Shell Resonators

Effects of imperfections on solid-wave gyroscope dynamics

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