2018
DOI: 10.1109/jmems.2018.2819994
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3-D Printed Biocompatible Micro-Bellows Membranes

Abstract: Bellows membranes are essential elements in many actuator devices. Currently, the size, shape, and dimensions of bellows membranes are limited by the fabrication process constraints. Miniaturizing the bellows membranes is a prerequisite for the development of integrated systems with novel capabilities as needed, for example, in advanced biomedical devices. Using a two-photon polymerization, 3-D printing technique, we present a high-resolution, high-yield, and customizable manufacturing process to produce Paryl… Show more

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Cited by 13 publications
(12 citation statements)
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“…The 3D printed pyramidal MNs were prepared using a direct laser writing system (Nanoscribe, GmbH, Photonics Professional GT) [21], utilizing two-photon polymerization of photoresist (IP-L780, Nanoscribe, GmbH) that was drop cast on a borosilicate glass coverslip (area of 2.5 cm 2 and thickness of 180 µm) ( Fig. 2 (a-b)).…”
Section: A Fabricationmentioning
confidence: 99%
“…The 3D printed pyramidal MNs were prepared using a direct laser writing system (Nanoscribe, GmbH, Photonics Professional GT) [21], utilizing two-photon polymerization of photoresist (IP-L780, Nanoscribe, GmbH) that was drop cast on a borosilicate glass coverslip (area of 2.5 cm 2 and thickness of 180 µm) ( Fig. 2 (a-b)).…”
Section: A Fabricationmentioning
confidence: 99%
“…The fabrication process of the Parylene C micro-bellows membrane summarized in Fig. 3 was previously reported [9]. The membrane's dimensions were 3 mm by 1.2 mm in length and width, respectively, with a height varying from 0.5 mm, when the membrane is fully folded (deflated), to about 2 mm, when it is fully expended (inflated).…”
Section: A Micropump Fabricationmentioning
confidence: 99%
“…Bellow membranes are suitable as actuators for microelectrolytic pumps, due to their fitting pressure ranges [9]. The predictable performance and expansion profile of microbellows translates to controlled dosage in drug delivery.…”
Section: Introductionmentioning
confidence: 99%
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“…Thus, with the advent of TPP, it is now feasible to 3D print microstructures having dimensions in the millimeter scale while providing feature sizes with micrometer resolution. [35,36] Hence, in this work, the TPP 3D printing technique is used to fabricate various designs of hollow MNs, made of IP-S photoresist, with an aspect ratio (height/outer diameter of the MN tip) ranging from 1 to 20. The design, fabrication, fluidic, and mechanical properties are studied, and the biocompatibility is investigated.…”
Section: Introductionmentioning
confidence: 99%