1998
DOI: 10.1557/s1092578300001137
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300°C GaN/AlGaN Heterojunction Bipolar Transistor

Abstract: A GaN/AlGaN heterojunction bipolar transistor has been fabricated using Cl2/Ar dry etching for mesa formation. As the hole concentration increases due to more efficient ionization of the Mg acceptors at elevated temperatures (> 250°C), the device shows improved gain. Future efforts should focus on methods for reducing base resistance, which are briefly summarized.

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Cited by 74 publications
(17 citation statements)
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References 13 publications
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“…Recently, the University of Florida and UCSB groups reported on the first demonstration of an AlGaN/GaN HBT (MacCarthy, et al 1998;Han, et al 1999;Ren, et al 1998). There is also a proposal for a unipolar Induced Base Transistor that operates in a way similar to that of a bipolar device .…”
Section: Gan Bipolar Transistorsmentioning
confidence: 99%
“…Recently, the University of Florida and UCSB groups reported on the first demonstration of an AlGaN/GaN HBT (MacCarthy, et al 1998;Han, et al 1999;Ren, et al 1998). There is also a proposal for a unipolar Induced Base Transistor that operates in a way similar to that of a bipolar device .…”
Section: Gan Bipolar Transistorsmentioning
confidence: 99%
“…The first Npn-type AlGaN/GaN HBTs [1,2] were reported in 1998, and after that, several AlGaN/GaN [3,4], GaN/InGaN [5], and AlGaN/InGaN HBTs [6] were developed. However, two major issues have been low current gains and large offset voltages in the common-emitter current-voltage (I-V) characteristics [1][2][3][4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…However, two major issues have been low current gains and large offset voltages in the common-emitter current-voltage (I-V) characteristics [1][2][3][4][5][6]. The maximum current gain reported so far has been 35 [4], which is much lower than those reported for HBTs composed of other materials.…”
Section: Introductionmentioning
confidence: 99%
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“…There is a strong interest in the research and development of GaN-based HBTs in recent years. Some groups have demonstrated the feasibility of this device and have achieved some impressive results [1][2][3], but there are many limitations in the growth and fabrication of GaN-based HBTs. In a vertical device structure like a HBT, accurately doping control is a important factor to get good device properties, because the doping concentration in each layer has a great effect on the device properties such as current gain, cutoff frequency and breakdown voltage.…”
Section: Introductionmentioning
confidence: 99%