300-mm-aperture phase-shifting Fizeau interferometer

Laser interferometers for control of optical surface shape

“…Метод СА использует одну интерферограмму, поэтому время измере-ния сокращено до десятков микросекунд. Однако принципиальной особенностью этого метода явля-ется регистрация интерферограммы со множе-ством полос, что приводит к появлению погреш-ностей, вызванных нарушением принципа общего хода лучей, а также к необходимости применения высокоразрешающих видеокамер без защитного стекла [3]. При контроле асферических поверхно-стей, особенно большой кривизны, при наклоне возникает аберрация типа комы.…”

“…SA method uses one interferogram, and therefore the measurement time is reduced to tens of microseconds. However, the key feature of this method is registration of interferogram with many fringes, and this fact brings measuring errors caused by the disturbance of common path principle and requires high-resolution CCD cameras without protective glass [3]. When testing the asphercial surfaces, especially with large cur vature, in case of inclination the aberration of coma type occurs.…”

A novel long trace profiler for synchrotron radiation optics

“…Such figures, however, are difficult to be tested by conventional methods [1]. As a result, various efforts have been proposed in the past decades [2][3][4][5][6][7][8][9][10].…”

Integrated diffractive shearing interferometry for adaptive wavefront sensing

“…Twyman-Green and Fizeau interferometers are commonly used in astronomy and aberrometry along with deformable mirrors to compensate for atmospheric distortions. Traditional interferometers such as these require strict alignment and vibration isolation to produce stable fringes, since a reference arm is needed to interfere with the aberrated wavefront arm [3]. Ronchi first proposed the use of linear patterns imaged onto mirrors to observe phase distortions [4], and this technique is the basis for using LSI as a wavefront sensor.…”