300  mm ruling engine producing gratings and echelles under
                interferometric control in China

Li, Xiaotian; Yu, Haili; Qi, Xiangdong; Feng, Shulong; Cui, Jia; Zhang, Shanwen; Jirigalantu,; Tang, Yuguo

doi:10.1364/ao.54.001819

Cited by 26 publications

(7 citation statements)

References 16 publications

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“…The GMR gratings with trapezoidal profiles not only have wider spectral bands than gratings with triangular profiles but are more likely to fabricate by grating ruling engines with diamond tools due to shallower groove depth and better tolerance range. [21][22][23] Thus, these results provide an alternative structure for wideband GMR reflectors amenable to classic fabrication methods.…”

Section: Introductionmentioning

confidence: 92%

Leaky Bloch modal evolution of wideband reflectors with zero-contrast gratings from symmetric trapez to triangle ridge shapes

2020

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We treat wideband subwavelength guided-mode resonant gratings with grating-depth dependent duty cycles. By rigorous numerical computations, we visualize Bloch modal evolution while transforming the grating profile from trapezoid to triangle. Parametric optimization is achieved using the coordinate transformation method of Chandezon. With the increase of the profile base angle, the higher mixed resonant modes TM 1;1&2 attract and combine and interact with the modes at both sides, forming wide reflection bands. This modal combination and interaction are the key determinant of broadband reflectivity spectral location and width. The optimized structure exhibits 99% reflectivity across a 613-nm spectral range, spanning a 1438-to 2051-nm wavelength range with a fractional bandwidth of ∼35%. It is shown that gratings with trapezoidal profiles possess a good tolerance to groove depth variation, thus being easier to fabricate with a diamond-tip than triangular profile-based gratings. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Section: Introductionmentioning

confidence: 92%

Leaky Bloch modal evolution of wideband reflectors with zero-contrast gratings from symmetric trapez to triangle ridge shapes

2020

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“…Thereafter, a reflective film (typically aluminium (Al) or gold (Au)) is deposited on the surface [6]. Subsequently, by employing a diamond cutting tool with a specific shape, multiple straight-line grooves can be fabricated via carving using a grating engraving machine [40], as shown in figure 3 [41]. Various types of grating blanks can be used, including zerodur, metal, standard glass, and SiC [37,42].…”

Section: Mechanical Rulingmentioning

confidence: 99%

A review on fabrication of blazed gratings

Gao

Chen

et al. 2021

J. Phys. D: Appl. Phys.

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Ultra-precision manufacturing plays a critical role in the successful development of various technological fields and has a significant influence on the processes conducted in human society. Blazed gratings with periodically inclined structures exhibit satisfactory characteristics, concentrating most of the diffracted light to a single, non-zero order. In addition to their high diffraction efficiency, blazed gratings can also significantly improve the sensitivity, resolution, and measurement range of grating measurement systems; they are also core functional components for improving ultra-precision manufacturing. Significant research and industrial attention have been devoted toward the manufacturing of blazed gratings. This review describes the physical principles of blazed gratings, the specific approaches used, and the achievements of typical processing methods, including mechanical ruling, holographic ion beam etching, electron beam lithography, and wet etching. The advantages and disadvantages of these fabrication methods were addressed, and prospective approaches were proposed to improve the manufacturing of blazed gratings.

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“…To date, the mechanical ruling method is the main method to manufacture large-area, high-precision gratings [12,13]. A diamond tool is used to extrude and polish the metal film on a grating substrate, to generate periodic v-shaped grooves on the film surfaces without forming chips or scrapes during the entire process.…”

Section: Introductionmentioning

confidence: 99%

A New Microhardness Testing Method on Grating Films

Jin

Jirigalantu

2020

Mathematical Problems in Engineering

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e manufacturing process of large-area, high-precision gratings is a very complicated and time-consuming process. e hardness testing of grating films is an important step in the entire process. In order to simplify the manufacturing process of gratings, we have proposed a new method for testing microhardness based on tool edge indentation. Also, it unified tool adjustment and microhardness testing steps in the grating manufacturing process. First, a mathematical model of the relationship between tool load and indentation contour length is established. e model parameters were then modified using tool indentation experiments with different loads. When measured with a nanoindenter, the average hardness of the grating film was 447 MPa. e hardness value of the grating film obtained by our proposed method is almost the same as that measured by the nanoindenter, and the maximum deviation is about 2.2% of the average hardness value. e experimental results show that our proposed method can replace the microhardness test method of using a nanoindenter. erefore, the disadvantages of using a nanoindenter to test the hardness of a grating film are avoided, such as the limited sample size, the sensitivity of the indenter to the roughness of the film and the depth of the indentation, and the accuracy of film testing, and the efficiency of grating ruling can be improved.

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300 mm ruling engine producing gratings and echelles under interferometric control in China

Cited by 26 publications

References 16 publications

Leaky Bloch modal evolution of wideband reflectors with zero-contrast gratings from symmetric trapez to triangle ridge shapes

Leaky Bloch modal evolution of wideband reflectors with zero-contrast gratings from symmetric trapez to triangle ridge shapes

A review on fabrication of blazed gratings

A New Microhardness Testing Method on Grating Films

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