325-nm Interference microscope

An interferogram produced by wide-aperture interferometers is studied both theoretically and experimentally. The fringe spacing is shown to increase nonlinearly with the numerical aperture and the fringe envelope to become narrower as the numerical aperture is increased. Phase measurements with wide-aperture interferometers therefore require calibration, and the phase can be measured only over a limited range. A calibration is given for accurate phase measurements, and the range over which the phase can be measured is calculated. Experimental measurements are presented and compared with theory.

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“…It is worth noting that a rigorous analysis with the Richards and Wolf vector theory of light 11,12 yields the same expression as in Eq. ͑4͒.…”

Section: Theorymentioning

confidence: 94%

Phase measurements with wide-aperture interferometers

Dubois¹,

Selb²,

Vabre³

et al. 2000

Appl. Opt.

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“…For the non-paraxial case, i.e., when the system has a high numerical aperture, the vectorial character of light can no longer be neglected and a scalar description becomes inaccurate. Therefore, vector diffraction theory is in general necessary to provide accurate information on the subtle details of the phase features near the focus, especially on the wavefront spacing near the high NA focus [6][7][8]. For the high NA case, Dubois et al [6] derived the increment factor !,…”

Section: Introductionmentioning

confidence: 99%

Longitudinal–differential phase distribution near the focus of a high numerical aperture lens: study of wavefront spacing and Gouy phase

Kim

Assafrao

Scharf

et al. 2013

Journal of Modern Optics

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We present a longitudinal-differential (LD) phase distribution near the focus of a high numerical aperture (NA=0.9) aplanatic lens illuminated with a linearly polarized monochromatic plane wave. The Richards and Wolf method is used to compute field distributions. The LD phase map is obtained by analyzing the deviation of the phase of the simulated wave to the phase of a referential plane wave. We discuss the irregular wavefront spacing that is linked to the Guoy phase and disclose subtle details of the phase features with respect to the spatial domain relative to the focal point. The LD phase is used to revisit different definitions of the focal region. We eventually identify the definition that is in agreement with the Gouy phase in the focal region. Our work paves the way towards a coherent notion to quantify the optical action of high NA optical elements that are increasingly important for many applications.

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“…Various methods for 3-D profilometry based on optical interferometry have evolved, including confocal imaging techniques [1][2][3][4] and interference microscopy. [5][6][7][8][9][10][11][12] Interference microscopy can eliminate lateral scanning. In this scheme, the depth information is obtained by measuring the degree of coherence rather than the phase between corresponding pixels in the object and reference planes.…”

Section: Introductionmentioning

confidence: 99%

“…It is capable of the same transverse resolution and depth response as a confocal microscope. As a result, different types of architecture based on the Linnik microscope, 5 the Mirau correlation microscope, 6,7 and the Michelson interferometer [8][9][10][11][12] have been proposed. In these systems, the object is scanned along the vertical axis ͑z axis͒ by a piezoelectric translation stage.…”

Section: Introductionmentioning

confidence: 99%

Analysis of the wavelength-to-depth encoded interference microscopy for three-dimensional imaging

Fainman

2002

Opt. Eng

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An interference microscope based on a wavelength-to-depth encoding technique is analyzed. The wavelength-to-depth encoding is achieved with a diffractive lens and a wavelength-tunable laser. The theoretical depth resolution is consistent with the experimental result. The technique offers a comparable depth resolution as traditional depth scanning. With the rapid advances in microfabrication and wavelengthtunable lasers, the system is promising for fast, noncontact, and highresolution three-dimensional imaging. © 2002 Society of Photo-Optical Instrumentation Engineers.

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325-nm Interference microscope

Cited by 16 publications

References 5 publications

Phase measurements with wide-aperture interferometers

Phase measurements with wide-aperture interferometers

Longitudinal–differential phase distribution near the focus of a high numerical aperture lens: study of wavefront spacing and Gouy phase

Analysis of the wavelength-to-depth encoded interference microscopy for three-dimensional imaging

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