348-GHz endfire slotline antennas on thin dielectric membranes

Ekström, H.; Gearhart, S.S.; Acharya, P. R.; Rebeiz, Gabriel M.; Kollberg, E.; Jacobsson, Stellan

doi:10.1109/75.153618

Cited by 17 publications

(4 citation statements)

References 4 publications

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“…The constant width and tapered slot antennas developed by Kollberg and colleagues would prove to be extremely useful for array applications in both the millimeter [54] and submillimeter-wave bands [55]. They could be integrated onto a wide variety of dielectric substrates, and stacked so that diffraction limited imaging was achievable in at least one plane.…”

Section: "Instrument Maker To the Stars"mentioning

confidence: 98%

Terahertz Pioneer: Erik L. Kollberg “Instrument Maker to the Stars”

Siegel

2014

IEEE Trans. THz Sci. Technol.

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Section: "Instrument Maker To the Stars"mentioning

confidence: 98%

Terahertz Pioneer: Erik L. Kollberg “Instrument Maker to the Stars”

Siegel

2014

IEEE Trans. THz Sci. Technol.

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“…For 2.5 THz λ e =47 µm, therefore 0.02λ e =1 µm. Endfire Tapered Slot Antennas (TSA) of various configurations (linear and exponential) have been investigated by a few groups [18]. Most of the work was done at MM wavelengths including some arrays.…”

Section: Introductionmentioning

confidence: 99%

2.5 THz multipixel heterodyne receiver based on NbN HEB mixers

et al. 2006

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A 16 pixel heterodyne receiver for 2.5 THz has been developed based on NbN superconducting hot-electron bolometer (HEB) mixers. The receiver uses a quasioptical RF coupling approach where HEB mixers are integrated into double dipole antennas on 1.5µm thick Si 3 N 4 / SiO 2 membranes. Spherical mirrors (one per pixel) and backshort distance from the antenna have been used to design the output mixer beam profile. The camera design allows all 16 pixel IF readout in parallel. The gain bandwidth of the HEB mixers on Si 3 N 4 / SiO 2 membranes was found to be 0.7÷0.9 GHz, which is much smaller than for similar devices on silicon. Application of buffer layers and use of alternative types of membranes (e.g. silicon-on-insulator) is under investigation.

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“…Micromachined microstrip and folded slot antennae, for applications in the millimeter frequency range, were reported in the last few years [19][20][21][22][23]. The first membranes-supported tapered slot line endfire antennae were proposed in [24].…”

Section: Introductionmentioning

confidence: 99%

Dry followed by wet backside etching processes for micromachined endfire antennae

Saadaoui

Pons

Plana

et al. 2005

J. Micromech. Microeng.

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This paper presents a novel technological process based on dry followed by wet backside silicon etching for the manufacturing of ‘quasi-three edge’ membranes-supported millimeter wave circuits. The process is based on a backside deep reactive ion etching used to remove the first 350 µm of silicon, followed by wet etching in KOH solution, to eliminate the remaining 50 µm of silicon and create quasi-free edge membranes, according to the undercut mechanism. In order to validate the technology, a Yagi–Uda antenna for 45 GHz was designed using the Zeland IE3D software package, and fabricated. The demonstrator was characterized in terms of return loss and isotropic gain using ‘on wafer’ measurements. The agreement between the modeling and the measurements is very good, and validates the new technological approach, which assures free-space propagation conditions for endfire membrane-supported antennae structures.

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348-GHz endfire slotline antennas on thin dielectric membranes

Cited by 17 publications

References 4 publications

Terahertz Pioneer: Erik L. Kollberg “Instrument Maker to the Stars”

Terahertz Pioneer: Erik L. Kollberg “Instrument Maker to the Stars”

2.5 THz multipixel heterodyne receiver based on NbN HEB mixers

Dry followed by wet backside etching processes for micromachined endfire antennae

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