2007
DOI: 10.1109/ultsym.2007.43
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3C-1 Review of Wave Propagation in BAW Thin Film Devices - Progress and Prospects

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Cited by 54 publications
(48 citation statements)
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“…The quality factor of traditional Surface Mounted Bulk Acoustic Wave Resonators (SMRs) is generally limited by substrate losses [9][10][11][12]. This is due to the fact that the conventional quarter wave acoustic mirror employed in SMRs reflects only the longitudinal acoustic waves and not the shear waves.…”
Section: Introductionmentioning
confidence: 99%
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“…The quality factor of traditional Surface Mounted Bulk Acoustic Wave Resonators (SMRs) is generally limited by substrate losses [9][10][11][12]. This is due to the fact that the conventional quarter wave acoustic mirror employed in SMRs reflects only the longitudinal acoustic waves and not the shear waves.…”
Section: Introductionmentioning
confidence: 99%
“…In order to obtain SMRs with high quality factors, the mirror should effectively reflect both waves. The necessity for reflection of both types of waves was recognized earlier and the influence of shear waves on Q factor is reviewed in [11]. Some optimized stacks have been reported for specific material combinations [9][10] based on numerical calculations.…”
Section: Introductionmentioning
confidence: 99%
“…The performance parameters to be considered for a BAW resonator design is reviewed in [10], [11], [15], [27], [28]. Although some of these reports investigate a few different parameters (such as temperature coefficient, power handling capabilities), the coupling coefficient and the quality factor determine the important characteristics of the resonator.…”
Section: The Key Performance Parameters For Baw Resonatorsmentioning
confidence: 99%
“…It is a measure of how efficiently the resonator converts electrical energy to mechanical energy, and vice versa [28]. The fundamental meaning of the electromechanical coupling coefficient for a "piezoelectric body" is defined by Berlincourt [29], [30] :…”
Section: The Effective Coupling Coefficient (mentioning
confidence: 99%
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