3D FEM simulation of SAW resonators using hierarchical cascading technique and general purpose graphic processing unit

Li, Xinyi; Bao, Jingfu; Qiu, Luyan; Matsuoka, Naoto; Omori, Tatsuya; Hashimoto, Ken–ya

doi:10.7567/1347-4065/ab0ffb

Cited by 22 publications

(10 citation statements)

References 39 publications

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“…HCT can be also applied to 3D FEM, and demonstrated full 3D FEM analysis of practical SAW device structures [46], [47]. The authors also showed that combination of HCT with high-end general-purpose graphic-processor unit (GPGPU) makes 3D FEM simulation possible for practical SAW device structures [47], [48]. Nevertheless, applicability of full 3D is limited to relatively simple cases due to the memory size embedded in GPGPU.…”

Section: Advanced Fem Simulationmentioning

confidence: 99%

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

et al. 2023

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This paper reviews the latest developments in microwave acoustic wave devices. After an introduction and brief history of bulk acoustic wave (BAW) and surface acoustic wave (SAW) devices, a review is given for guided SAWs and XBARs -two new technologies, which are promising for future 5G applications. Following this, we discuss recent simulation techniques, such as 3D finite element method (3D FEM) and simulation of nonlinearities, as well as filter synthesis. Next, a review on tunable and reconfigurable acoustics is given. Finally, we present the latest developments in microwave acoustics for millimeter-wave (mm-wave) operation as well as BAW oscillators.INDEX TERMS Bulk acoustic wave (BAW) devices, filter, filter-synthesis, front-end, high power, MTT 70th Anniversary Special Issue, multiplexer, nonlinearity, resonator, surface acoustic wave (SAW) devices.

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Section: Advanced Fem Simulationmentioning

confidence: 99%

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

et al. 2023

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“…In 2020, Naoto Matsuoka, studied the excessive scattering loss of SiO 2 /128-LN TC-SAW resonator on HCT finite element method. The simulation results show that the figure of merit decreases significantly with the increase of the number of acoustic scattering mechanisms, but the estimated value Q is still much higher than the actual value, indicating that acoustic scattering at structural discontinuities is not the main loss mechanism [ 49 ].…”

Section: Saw Filter Technologymentioning

confidence: 99%

Development and Application of SAW Filter

Chen

Zhu

2022

Micromachines

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With the in-depth advancement of the fifth generation (5G) mobile communication technology, the technical requirements for filters are also constantly improving. Surface acoustic wave (SAW) filters are widely used in home TV, mobile communications, radio frequency filters and radar due to their simple structure, few mask layers, easy miniaturization, and low cost. Through the continuous improvement of communication technology, SAW has developed into various high-performance acoustic filters from bulk SAW with the support of some new architectures, new materials and advanced modeling techniques. This paper analyzes and reviews the research situation of SAW filter technology.

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“…Compared with widely used FEM/BEM hybrid methods [24,25], FEM has obvious advantages, especially its remarkable generality. It can be used to analyze a SPUDT composed of arbitrary materials, crystal cuts, as well as different electrode shapes [26][27][28][29][30][31]. Therefore, we use FEM to calculate the parameters needed for simulation and then to optimize the design of the transducer structure.…”

Section: Design and Optimizationmentioning

confidence: 99%

Analysis and Design of Single-Phase Unidirectional Transducers with High Directivity

Sun

Shao

et al. 2021

Applied Sciences

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Electrode-width-controlled (EWC) single-phase unidirectional transducers (SPUDT) contribute to reduction of insertion loss of surface acoustic wave (SAW) devices due to their strong unidirectional properties. In this work, we propose a method to optimize the unidirectionality of EWC-SPUDT based on our research results that the unidirectionality of the EWC-SPUDT cell is strongly related to its reflectivity and its unidirectional angle. Furthermore, in order to ensure strong unidirectionality to achieve low insertion loss, a simulator based on the finite element method (FEM) is used to study the relationship between geometrical configuration of the EWC-SPUDT cell and its reflection coefficient, as well as its transduction coefficient. Simulation results indicate that the reflection coefficient of the optimized EWC-SPUDT cell composed of 128° YX lithium niobite (LiNbO3) substrate and Al electrodes with thickness of 0.3μm reaches the optimal value of 5.17% when the unidirectional angle is designed to be −90°. A SAW delay line is developed with the optimized EWC-SPUDT cell without weighing, and the simulation results are verified by experiments. The experimental results show that the directivity exceeds 30 dB at the center frequency and the insertion loss is just 6.7 dB.

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3D FEM simulation of SAW resonators using hierarchical cascading technique and general purpose graphic processing unit

Cited by 22 publications

References 39 publications

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

Development and Application of SAW Filter

Analysis and Design of Single-Phase Unidirectional Transducers with High Directivity

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